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Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
摘要： Plasma-enhanced atomic layer deposition (PEALD) is well-known for fabricating conformal and uniform films with a well-controlled thickness at the atomic level over any type of supporting substrate. We prepared nickel oxide (NiO) thin films via PEALD using bis(ethylcyclopentadienyl)-nickel (Ni(EtCp)2) and O2 plasma. To optimize the PEALD process, the effects of parameters such as the precursor pulsing time, purging time, O2 plasma exposure time, and power were examined. The optimal PEALD process has a wide deposition-temperature range of 100-325 oC and a growth rate of 0.037±0.002 nm per cycle. The NiO films deposited on a silicon substrate with a high aspect ratio exhibited excellent conformality and high linearity with respect to the number of PEALD cycles, without nucleation delay.
关键词： Thin Film,Nickel Oxide,Plasma-enhanced Atomic Layer Deposition,Bis(ethylcyclopentadienyl)-nickel,Atomic Layer Deposition
更新于2025-09-09 09:28:46
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[IEEE 2018 28th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) - Greifswald, Germany (2018.9.23-2018.9.28)] 2018 28th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) - 2-D Lengmuir Probe Set for Diagnostics of Plasma Density Distribution and Cathode Sheath Expansion after Current Zero in a Vacuum Interrupter
摘要： Two-dimensional set of miniature Langmuir probes for the diagnostics of evolution of plasma distribution during current zero (CZ) transition in vacuum interrupter is presented. The electron saturation probe currents are traced just before and after current zero during the transient recovery voltage (TRV) rise in a gap with copper-chromium electrodes. Probe measurements are accompanied with the tracing of post-arc currents. By processing the probe current traces, the evolution of plasma density distribution as well as cathode sheath dynamics after CZ are reconstructed in real-time 2-D mode. Plasma density distribution and its dynamics during CZ transition are discussed as depended on arc parameters, such as arc current amplitude and duration, TRV rise rate and arc stabilization by axial magnetic field.
关键词： post-arc plasma,current-zero transition,high-current vacuum arc,vacuum circuit breakers,cathode sheath
更新于2025-09-09 09:28:46
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Plasma enhanced decoration of nc-TiO2 on electrospun PVDF fibers for photocatalytic application
摘要： The combination of TiO2 nanoparticles (NPs) and electrospun PVDF fibers to obtain organic-inorganic composite membranes has been of great interest in many fields, including photocatalysis, sensors, filtration, membrane anti-fouling and wastewater treatment. The weak adhesion between TiO2 and the organic substrate, however, is still a key obstacle that inhibits the practicability and reuse of TiO2-PVDF functional membranes. Herein, we provide an improved and effective strategy for in situ growth of high adhesion of TiO2 NPs on PVDF fibers via a combined approach of electrospinning, DBD cold plasma pretreatment and hydrothermal reaction. Sufficient titanium source was embedded in the electrospun fibers in advance, and the following DBD cold plasma treatment remarkably increases the number of reactive sites to induce TiO2 growth from the inside out, thereby firmly attaching to the PVDF fibers. The as-prepared TiO2-PVDF membranes exhibit improved and stable performance for CO2 photoreduction.
关键词： Photocatalytic,DBD cold plasma,Composites
更新于2025-09-09 09:28:46
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Measuring the plasma-wall charge by infrared spectroscopy
摘要： We show that the charge accumulated by a dielectric plasma-facing solid can be measured by infrared spectroscopy. The approach utilizes a stack of materials supporting a surface plasmon resonance in the infrared. For frequencies near the Berreman resonance of the layer facing the plasma the re?ectivity dip —measured from the back of the stack, not in contact with the plasma— depends strongly on the angle of incidence making it an ideal sensor for the changes of the layer’s dielectric function due to the polarizability of the trapped surplus charges. The charge-induced shifts of the dip, both as a function of the angle and the frequency of the incident infrared light, are large enough to be measurable by attenuated total re?ection setups.
关键词： Berreman resonance,surface plasmon resonance,plasma-wall charge,attenuated total re?ection,infrared spectroscopy
更新于2025-09-09 09:28:46
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Personalized nanomedicine: a rapid, sensitive, and selective UV–vis spectrophotometry method for the quantification of nanostructured PEG-asparaginase activity in children’s plasma
摘要： PEGylated asparaginase (PEG-ASNase), which hydrolyzes asparagine to ammonia and aspartic acid, is an effective nanostructured antitumor agent for acute lymphoblastic leukemia (ALL). In order to monitor the activity of PEG-ASNase in plasma and design an individualization project, a rapid and sensitive method to determine PEG-ASNase activity in plasma using ultraviolet–visible spectrophotometry was established. Methods: PEG-ASNase is commonly used in acute lymphoblastic leukemia. With Nessler’s reagent as the chromogenic reagent of ammonia, a stable yellow complex was produced. The units of enzyme activity were defined as micromoles of ammonia released per minute. Results: Calibration curves fitted by plotting the OD at 450 nm of the Nessler product vs concentration were linear in the range of 27.8–1,111.0 IU/L with r2=0.999. The lower limit of quantification for PEG-ASNase activity in human plasma was 20 IU/L with good accuracy and precision. The intra- and interday precision (relative standard deviation) values were below 10% and accuracy ranged from 90% to 110% at all quality control levels. Analytical recoveries were determined between 90% and 110% for all quality control samples. Conclusion: This study proved that the Nessler method is well validated and can be successfully applied in the determination of plasma samples in the clinical setting for patients with ALL. It takes personalized nanomedicine to an entirely new level.
关键词： PEG-ASNase,plasma,ALL,enzyme activity,Nessler method,personalized nanomedicine,UV–vis spectrophotometry,Nessler’s reagent
更新于2025-09-09 09:28:46
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Hollow Plasma-Sprayed Spherical Nanostructured Titania Feedstock for Photocatalytic Applications
摘要： There have been persistent challenges in thermal spraying of nanoparticles feedstock for making nanostructured coatings with desired mechanical strength. Here we report fabrication of nanostructured titania coatings by atmospheric plasma spraying of hollow titania spheres, and microstructures and photocatalytic activities of the coatings are examined. The hollow microspheres are * 50 lm in diameter and possess a mesoporous shell of 1-3 lm in thickness. The coatings show micro-nano hybrid structures with well-retained titania nanoparticles and agglomerated granules. High anatase content is achieved in the coatings, suggesting that constrained heating of the particles effectively prevents the transformation from anatase to rutile. The spherical characteristics of the organic materials in the feedstock powder play dominant roles in regulating the physicochemical characteristics of the coatings for photocatalytic performances. These results would provide insight into large-scale thermal spray fabrication of nanostructured coatings using appropriately designed hollow spherical powder.
关键词： nanostructured coatings,plasma spray,titania nanoparticles,photocatalytic performances,hollow microspheres
更新于2025-09-09 09:28:46
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A TUNABLE ELECTROMAGNETIC BANDGAP STRUCTURE USING PLASMA
摘要： A tunable electromagnetic-bangap (EBG) structure based on a double layer slotline using plasma is proposed. The plasma permittivity can be tuned by the electron density. The idea of integrating periodical plasma elements inside the slot to tune the stopband is investigated. An electron density and an electron collision frequency equal to 1.75 1013 cm?3 and 1010 s?1 respectively, are the plasma parameters selected in this study. The simulations reveal a shift rate of the second stopband equal to 6%. A new con?guration of the structure is also proposed to adapt it better to the experimental requirements. Based on the simulation results, adding the plasma elements to the modi?ed con?guration shifts the stopband 4% and reduces its bandwidth by 43% (at ?20 dB).
关键词： electron density,slotline,plasma,tunable electromagnetic bandgap,electron collision frequency,stopband
更新于2025-09-09 09:28:46
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Study on the Effect of Plasma Treatment on Flat-band-voltage and Equivalent Oxide Thickness using Metal-organic Chemical Vapor Deposition TiN Film as p-MOSFETS Metal Gate Electrode
摘要： This work aimed to study on the effects of plasma treatment on flat band voltage (Vfb) and equivalent oxide thickness (EOT) using Metal-organic Chemical Vapor Deposition (MOCVD) TiN film as p-MOSFETs metal gate electrode. The plasma treatment conditions effect on the resistance and composition properties of MOCVD TiN, consequently, they can modulate work function and control threshold voltage. The effects of “plasma treatment” were imposed to favor the formation of Ti-N bonds, thus decreasing the rate Ti-C bond and favoring a crystallized stoichiometric TiN phase to increase PMOS Vfb shift. Meanwhile, plasma treatments accelerate interfacial oxide formation and increase EOT. On the other hand, EOT increases with the increase of plasma treatment time and power in this work, but Vfb does not always increase and reach a max value.
关键词： Plasma treatment,pMOSFETs,MOCVD TiN,EOT,Vfb
更新于2025-09-09 09:28:46
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Numerical Identification of Trivelpiece–Gould Waves in an Electron Cyclotron Resonance Etching Reactor
摘要： Electron cyclotron resonance (ECR) plasma sources have been widely used for ultra-large-scale integration manufacturing processes because of their wide operating range and excellent uniformity over 300- or 450-mm diameter wafer. However, microwave electromagnetic fields in magnetized plasma-filled reactors are not well understood because of the complexity of electromagnetic wave field analysis. We conducted microwave electromagnetic field analysis of an ECR plasma etcher by the finite-element method using a simulation platform. Complicated electric field patterns were clearly observed under some conditions. We investigated the patterns in detail to determine whether they were spurious or not. The patterns proved to be Trivelpiece–Gould waves according to their characteristics imposed by the dispersion relation of waves. This analysis approach is a powerful method because very fine-wave structures can be identified.
关键词： Electron cyclotron resonance (ECR),plasma sources,etching,Trivelpiece–Gould (TG) waves
更新于2025-09-09 09:28:46
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Attaining reduced lattice thermal conductivity and enhanced electrical conductivity in as-sintered pure n-type Bi2Te3 alloy
摘要： Undoped n-type Bi2Te3 bulks were prepared via the liquid state manipulation (LSM) with subsequent ball milling and spark plasma sintering processes. The sample with LSM obtains higher carrier concentration and larger effective mass compared with that without LSM, exhibiting favourable electrical transport properties. More importantly, a much reduced lattice thermal conductivity * 0.47 W m-1 K-1 (decreased by 43%) is obtained, due to the enhanced multiscale phonon scattering from hierarchical microstructures, including boundaries, nanograins and lattice dislocations. Additionally, due to the increased carrier concentration and enlarged band gap, the bipolar effect is effectively suppressed in sample BT-LSM. Consequently, zTmax * 0.66 is achieved in the sample with LSM at higher temperature of 475 K, almost 22% improvement compared with that of the contrast.
关键词： spark plasma sintering,thermoelectric,electrical conductivity,thermal conductivity,liquid state manipulation,ball milling,Bi2Te3
更新于2025-09-09 09:28:46