- 标题
- 摘要
- 关键词
- 实验方案
- 产品
-
Extension of the range of profile surface roughness measurements using metrological atomic force microscope
摘要： The calibration service of profile surface roughness by using a metrological atomic force microscope is now available at National Metrology Institute of Japan (NMIJ), AIST. The calibration method is designed by referring to ISO 19606: 2017 (JIS R 1683: 2014). The scope of the ISO 19606: 2017, however, is limited to roughness measurements of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm–30 nm. Currently there is strong demand for the measurement of surface roughness of more than 30 nm in the precision machining industry and for the measurement of surface roughness of sub-nanometer order in the semiconductor industry. In order to meet such demand, it is necessary to extend the range of surface roughness measurements in the NMIJ's calibration service. In this study, authors performed surface roughness measurements using a metrological AFM and evaluated their uncertainties. As a result of a series of measurements and evaluation of their uncertainties, it has been found that the calibration range can be extended to surfaces with an arithmetical mean roughness, Ra, in the range of about 0.2 nm–100 nm. The measurement results and the future challenges are reported in this paper.
关键词： Probe-tip diameter evaluation,Calibration,Metrological AFM,Surface roughness
更新于2025-09-19 17:15:36
-
[IEEE 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Singapore (2018.7.16-2018.7.19)] 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - SIMS Analysis Methodology to Determine Sc Diffusion in Silicon Oxide
摘要： the Scandium (Sc) diffusion in silicon oxide (SiO2) from ScAlN thin film was investigated using Secondary Ion Mass Spectrometry (SIMS) instead of using the X-Ray Diffraction (XRD) and Transmission Electron Microscope (TEM) techniques. Sc, Al, and Si elements depth profiles were performed from sample front side and back side. Al and Sc performance at ScAlN/ SiO2 interface and in SiO2 layer was compared for two conditions, annealed and non-annealed. To obtain precise test result, an effective sample preparation was implemented, which will be discussed in the paper.
关键词： Diffusion,Sputter-induced surface roughness,knock on effect
更新于2025-09-19 17:15:36
-
Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process
摘要： Silicon wafer as a brittle material is extensively used in semiconductors. The surface quality of this material significantly affects the quality and efficiency of related components. In this study, the coupled algorithm of SPH/FEM is used to simulate the surface polishing of silicon wafers with Magnetic Abrasive Finishing process. The effects of rotational speed and machining gap on percent change in surface roughness (%?Ra) and material removal (MR) are comprehensively analyzed with simulations and experiments. Furthermore, the material removal mechanism in wafers was investigated by using AFM. Our observations showed that both micro-fracture and micro-cutting mechanisms might happen and it highly depends on polishing parameters. Results of the simulations and experimental data showed that MR and %?Ra value increase with increasing rotational speed and decreasing machining gap. According to our experimental findings, maximum %?Ra and MR are 65% and 39.09 mg, respectively.
关键词： Material removal,Surface Roughness,Magnetic Abrasive Finishing,Al2O3,FEM/SPH,Silicon Wafer,Nano-finishing
更新于2025-09-19 17:15:36
-
Effect of anode surface treatment by oblique ion bombardment method on Organic light-emitting diodes performance
摘要： In this work, The influence of oblique ion bombardment treatment of the surface of indium tin oxide (ITO) thin films, on the surface parameters of the film and then the performance of organic light-emitting diodes (OLEDs) has been investigated. Both commercially available and uniquely fabricated ITO substrates which were deposited by electron beam evaporation method have been employed. The ITO surface characteristics have been investigated by atomic force microscopy (AFM), X ray diffraction (XRD) and UV-Vis-NIR spectrophotometer. Then a typical OLED device was fabricated on different ITO surfaces and characterized by Keitley 2450 and JAZ spectrometer. The results show that after anode surface treatment by means of oblique Argon ion bombardment method, surface roughness is extremely decreased, which resulted in increasing current and power efficiencies and also there was no evidence of ohmic junctions before driving voltage. The maximum ohmic resistance, current and power efficiencies were 371 MΩ, 6.4 cd/A and 0.91 cd/w, respectively. Also it is found that local non-emissive area or dark spots creation reduced for treated surface device. These findings provide a simple way to effectively reduce the roughness of the ITO films as anode to be applied in optoelectronic devices such as OLEDs.
关键词： Surface roughness,Organic light emitting diodes,Oblique ion bombardment,ITO,Surface treatment,Dark spot
更新于2025-09-19 17:13:59
-
Surface Properties of Beech Wood after CO2 Laser Engraving
摘要： The paper deals with the properties of a beech wood surface treated by CO2 laser engraving. The studied concerns were the discoloration, changes to morphology assessed through roughness and waviness parameters, and surface wetting with standard liquids (water and diiodomethane), with the aim of determining the wood surface free energy. The results have confirmed that the studied properties of the beech wood surface varied significantly, which were affected by the laser beam power P and raster density n. With increasing P and n, the lightness L* (expressed in CIE L*a*b* color space) decreased significantly. We also observed significant variation in the color coordinates a* and b*. At 8% laser power, the roughness and waviness parameters measured parallel as well as perpendicular to the grain increased proportionally with the increasing raster density. However, 4% laser power was not associated with distinct changes. Increasing the raster density reduced beech wood surface wetting equally with water and with diiodomethane. This was reflected in the higher contact angle values. The wood surface exhibited higher hydrophobicity at 4% laser power. At this power, the increasing raster density was reflected in the decreasing surface free energy, due to its polar component decrease. At 8% laser power, the changes in surface free energy were very minor from the practical viewpoint. The results suggest a potential good adhesion between film-forming materials and wood. However, the gluing performance may be negatively affected by the high roughness attained at 8% laser power and at higher raster densities.
关键词： color,wetting,surface properties,CO2 laser,roughness,contact angle,beech wood,surface free energy
更新于2025-09-19 17:13:59
-
Effect of laser texturing on the surface characteristics and bonding property of 30CrMnSiA steel adhesive joints
摘要： The influence of laser texturing on the bonding property of 30CrMnSiA steel joints were investigated. Three patterns including dimple, groove and grid were laser textured on the 30CrMnSiA steel substrate by nanosecond fiber laser. The processed surface was characterized by surface morphology, surface roughness (Ra and Rz) and wettability. The single lap adhesive joints were fabricated and fracture surfaces were observed. The accelerated hygrothermal aging experiments were performed. The results indicated that surface roughness and wettability were both enhanced after laser texturing. The grid patterned substrate was improved pronouncedly, where Ra increased by 400% and Rz was 13 times higher than as-received specimens, and the contact angle was decreased from 65° to 24°. The shear strength of adhesive joints for dimple pattern was not improved evidently, while it was 14.6 MPa and 23.3 MPa in the groove and grid patterned specimens, which was increased by 219%, 348% compared to as-received ones, respectively. The coverage of adhesive layer on the fracture surface was increased and the fracture mode of dimple and groove patterned specimens was adhesive failure and a cohesive failure was achieved for those joints with grid pattern. The bonding property was decreased after hygrothermal aging, and the residual strength of specimens with grid pattern was the highest. The fracture mode was not changed in all adhesive joints.
关键词： Laser texturing,Wettability,Roughness,Adhesive strength,Hygrothermal aging
更新于2025-09-19 17:13:59
-
Microchannel fabrication and metallurgical characterization on titanium by nanosecond fiber laser micromilling
摘要： Laser micromilling technique is used to manufacture microchannel on metals and nonmetals. Microfeatures ≤100 μm are still challenging for fabrication by common methods. Nanosecond fiber laser micromachining has become more popular owing to its prospective implementation in laser micromilling. Microchannel application relies on its geometric dimension, profile, and surface quality. In this study, an attempt was made to explore the impact of process parameters scanning times, scanning velocity, pulse repetition rate, and assist gas pressure on top kerf width, taper, surface roughness, and metal removal rate in laser micromilling experimentally. Microchannel width varied between 45.5 and 70.9 μm. A regression model has been developed for each response. ANOVA (analysis of variance) has been carried out to remove insignificant parameters. Thermal stress analyzed by surface cracks inside microchannel by Scanning Electrone Microscopy (SEM) images. Higher PRR, lower no. of scans, higher scanning speed and high air pressure found suitable for lesser surface cracks. Redeposition observed at slower scanning velocity and minimum scanning times. Oxidation zone from boundary of channel varies between 37 and 58 μm. Oxide formed on Ti surface which increases oxygen content toward center of channel from 51.08 to 76.22% compared to outside surroundings.
关键词： oxidized zone,MRR,kerf width,LMM,surface cracks,taper,surface roughness,recast layer
更新于2025-09-19 17:13:59
-
Impact of Surface Roughness in Nanogap Plasmonic Systems
摘要： Recent results have shown unprecedented control over separation distances between two metallic elements hundreds of nanometers in size, underlying the effects of free-electron nonlocal response also at mid-infrared wavelengths. Most of metallic systems however, still suffer from some degree of inhomogeneity due to fabrication-induced surface roughness. Nanoscale roughness in such systems might hinder the understanding of the role of microscopic interactions. Here we investigate the effect of surface roughness in coaxial nanoapertures resonating at mid-infrared frequencies. We show that although random roughness shifts the resonances in an unpredictable way, the impact of nonlocal effects can still be clearly observed. Roughness-induced perturbation on the peak resonance of the system shows a strong correlation with the effective gap size of the individual samples. Fluctuations due to fabrication imperfections then can be suppressed by performing measurements on structure ensembles in which averaging over a large number of samples provides a precise measure of the ideal system’s optical properties.
关键词： hydrodynamic model,nonlocal response,coaxial aperture,plasmonics,epsilon-near-zero mode,surface roughness
更新于2025-09-19 17:13:59
-
On the Relevance of Volumetric Energy Density in the Investigation of Inconel 718 Laser Powder Bed Fusion
摘要： Laser powder bed fusion (LPBF) can fabricate products with tailored mechanical and surface properties. In fact, surface texture, roughness, pore size, the resulting fractional density, and microhardness highly depend on the processing conditions, which are very difficult to deal with. Therefore, this paper aims at investigating the relevance of the volumetric energy density (VED) that is a concise index of some governing factors with a potential operational use. This paper proves the fact that the observed experimental variation in the surface roughness, number and size of pores, the fractional density, and Vickers hardness can be explained in terms of VED that can help the investigator in dealing with several process parameters at once.
关键词： additive manufacturing,surface roughness,laser powder bed fusion
更新于2025-09-19 17:13:59
-
Laser Finishing of Ti6Al4V Additive Manufactured Parts by Electron Beam Melting
摘要： In this work, the feasibility of laser surface ?nishing of parts obtained by additive manufacturing (AM) was investigated. To this end, a 450 W ?ber laser (operating in continuous wave, CW) was adopted to treat the surface of Ti-6Al-4V samples obtained via electron beam melting (EBM). During the tests, di?erent laser energy densities and scanning speeds were used. In order to assess the quality of the treatment, either the as-built or the treated samples were analyzed by means of a three-dimensional (3D) pro?lometer, digital microscopy, and scanning electron microscopy. Analysis of variance (ANOVA) was performed to check which and how process parameters a?ected the ?nishing. The results show that, in the best conditions, the laser treatment reduced surface roughness by about 80%.
关键词： surface roughness,microhardness,EBM,?ber laser
更新于2025-09-19 17:13:59