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Low temperature fabrication of high quality gate insulator in metal-oxide-semiconductor capacitor using laser annealing
摘要： This paper reports the fabrication of a high quality gate oxide for metal-oxide-semiconductor field effect transistors using a continuous wave blue laser. A thin Zr metal layer was inserted between the dielectric and substrate to increase laser absorption and reduce the interface layer. A simulation of laser irradiation showed that metal layer insertion induces a significant increase in temperature during laser annealing compared to the dielectric without a metal layer. The laser annealed capacitor with a 1 nm-thick Zr metal layer showed superior electrical characteristics, such as high capacitance, low leakage current, low fixed charge density and low interface state density. Based on these results and the economic advantage of blue laser diodes, this technique can be a solution for low temperature processes, such as monolithic 3-dimensional integration, where low temperature processes are required.
关键词： 445 nm wavelength,Zirconium oxide,scavenging effect,laser anneal,blue,MOSCAP,continuous wave,visible laser
更新于2025-11-14 17:28:48
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Graphene oxide-based zirconium oxide nanocomposite for enhanced visible light-driven photocatalytic activity
摘要： In the present investigation, an efficient visible light-active, graphene oxide-based zirconium oxide nanocomposite (GO–ZrO2) has been synthesized by co-precipitation method. The synthesized photocatalyst was characterized by XRD, FTIR, FE-SEM, EDS, TEM, TGA, PL, UV-DRS and BET surface area analysis. The characterization results illustrate the homogeneous dispersion of ZrO2 nanoparticles in the GO–ZrO2 nanocomposite with excellent harmony between GO and ZrO2 nanoparticles. The photocatalytic efficiency of the synthesized GO–ZrO2 nanocomposite was evaluated by photodegradation of hazardous, water-soluble rhodamine B and methylene blue dyes under visible light irradiation. The 90% photocatalytic degradation of rhodamine B dye (with initial conc. 30 mg/L) was observed in 105 min of visible light irradiation, while 99.23% of methylene blue (with initial conc. 100 mg/L) dyes degradation was observed in just 60 min using 25 mg/100 ml dose of GO–ZrO2 nanocomposite as a photocatalyst. The mechanistic investigation using scavengers suggest that the superoxide (O2·?) is the most reactive species involved in the photodegradation of organic dyes. The synthesized photocatalyst GO–ZrO2 nanocomposite also exhibits excellent thermal stability and reusability.
关键词： Methylene blue,Rhodamine B,Photocatalytic activity,Zirconium oxide,Graphene oxide,Visible light,Co-precipitation method
更新于2025-09-23 15:23:52
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Formation of zirconia precursor nanoplates mediated by ionic liquid and transformation to monoclinic ZrO <sub/>2</sub> nanostructures
摘要： The [Zr(OH)5]– imidazolium complex was used to synthesize a zirconia precursor with plate-like nanostructure hydrolyzed under strong acid conditions, which was characterized by means of powder X-ray diffraction, thermogravimetric-differential scanning calorimetry, Fourier transform infrared spectroscopy, Raman spectroscopy, elemental analysis, inductively coupled plasma and electronic differential system. The zirconia precursor can be transformed to monoclinic ZrO2 by annealing at a temperature above 400 °C. With the increasing of the curing temperature, it tended to give rise to porous ZrO2 nanostructures.
关键词： Zirconia precursor,Zirconium oxide,Anion exchange reaction,Nanoplate,Ionic liquid
更新于2025-09-23 15:22:29
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Valence band behaviour of zirconium oxide, Photoelectron and Auger spectroscopy study
摘要： In this study X-ray Photoelectron Spectroscopy and Ultraviolet Photoelectron Spectroscopy were combined to investigate the effect of oxygen incorporation on the valence band behaviour of ZrOx. The Auger transitions involving valence bands are found to mimic the self-folded density of state measured using Ultraviolet Photoelectron Spectroscopy. The valence band once constructed in a sub-oxide form, stays at a fixed energy position despite the change in the stoichiometry. This behaviour is found to be useful in setting a reference for X-ray Photoelectron Spectroscopy charge correction. The results of the charged corrected spectra were compared to other methods and found to be in great agreement. Finally, a correlation between the core-level binding energy and the structural property of ZrOx is given.
关键词： valence band,Ultraviolet Photoelectron Spectroscopy,X-ray Photoelectron Spectroscopy,Photoelectron,zirconium oxide,Auger spectroscopy
更新于2025-09-23 15:21:01
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Atomic layer deposition of zirconium oxide thin film on an optical fiber for cladding light strippers
摘要： Cladding light strippers are essential components in high-power fiber lasers used for removal of unwanted cladding light that can distort the beam quality or even damage the whole fiber laser system. In this study, an Atomic Layer Deposition system was used for the first time to prepare the cladding light stripper devices using a 40 nm thick zirconia layer grown on optical fiber. The thickness of the zirconia coating was confirmed using the Scanning Electron Microscopy (SEM) and the Ellipsometry techniques. The elemental analysis was also performed using the wavelength dispersive X-ray spectroscopy technique. The Raman spectroscopy and XRD data confirm the structure of the atomic layer deposition-grown zirconia thin films to be predominantly amorphous. The cladding light stripper devices formed using the zirconia thin films with the lengths of 8.5 and 15.5 cm were able to strip approximately 30% (~1.5 dB) and 40% (~2.3 dB) of the unwanted cladding light.
关键词： zirconium oxide,atomic layer deposition,cladding light stripper,thin film,Fiber laser
更新于2025-09-23 15:19:57
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Laser-Milled Microslits Improve the Bonding Strength of Acrylic Resin to Zirconia Ceramics
摘要： Heightened aesthetic considerations in modern dentistry have generated increased interest in metal-free “zirconia-supported dentures.” The lifespan of the denture is largely determined by the strength of adhesion between zirconia and the acrylic resin. Thus, the effect on shear bond strength (SBS) was investigated by using an acrylic resin on two types of zirconia ceramics with differently sized microslits. Micromechanical reticular retention was created on the zirconia surface as the novel treatment (microslits (MS)), and air-abrasion was used as the control (CON). All samples were primed prior to acrylic resin polymerization. After the resin was cured, the SBS was tested. The obtained data were analyzed by using multivariate analysis of variance(α = 0.05). After the SBS test, the interface failure modes were observed by scanning electron microscopy. The MS exhibited significantly higher bond strength after thermal cycles (p < 0.05) than the CON. Nevertheless, statistically comparisons resulted in no significant effect of the differently sized microslits on SBS (p > 0.05). Additionally, MS (before thermal cycles: 34.8 ± 3.6 to 35.7 ± 4.0 MPa; after thermal cycles: 26.9 ± 3.1 to 32.6 ± 3.3 MPa) demonstrated greater SBS and bonding durability than that of CON (before thermal cycles: 17.3 ± 4.7 to 17.9 ± 5.8 MPa; after thermal cycles: 1.0 ± 0.3 to 1.7 ± 1.1 MPa), confirming that the micromechanical retention with laser-milled microslits was effective at enhancing the bonding strength and durability of the acrylic resin and zirconia. Polycrystalline zirconia-based ceramics are a newly accessible material for improving removable prosthodontic treatment, as the bond strength with acrylic resin can be greatly enhanced by laser milling.
关键词： thermocycling,zirconium oxide,acrylic resin,bond strength,laser
更新于2025-09-19 17:13:59
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Effect of post deposition annealing on the electrical properties of YSZ thin films deposited by pulsed laser technique
摘要： In this paper we report the detailed analysis of the effect of in-situ annealing on the electrical properties of yttrium stabilized zirconium oxide (YSZ) thin films grown by pulsed laser deposition on silicon substrates. The optimized metal/YSZ/Si devices showed low leakage current, good dielectric strength and a breakdown field strength of 4.13 MV/cm. The magnitudes of flat band voltage, and interfacial charge density have been extracted from the capacitance-voltage (C-V) characteristics of the MOS structure. The C-V characteristics show a small hysteresis which indicates the presence of traps. The observed shift in the flat band voltage and hysteresis are explained with the help of X-ray photoelectron spectroscopy. From the XPS depth profile analysis of the samples it was found that as we go from the surface to the interface, oxygen concentration in the deposited film decreases, i.e. the oxide becomes zirconium rich. This has been correlated with the observed electrical properties.
关键词： Thin films,Interface,Dielectric breakdown,Gate dielectric,Zirconium oxide (ZrO2),Pulsed laser deposition
更新于2025-09-16 10:30:52
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Adapted Pechini method to prepare DSA type electrodes of RuO2-ZrO2 doped with Sb2O5 over titanium plates
摘要： This paper describes a thermal method to obtain metal oxides on a titanium substrate surface. This adapted Pechini method is a versatile, easy to handle and scalable technique to obtain electrodes for industrial uses, such as Dimensionally Stable Anodes (DSA). This method has advantages over other thermal methods like dip coating or sputtering, as it needs a smaller amount of polymeric mixture than dip coating method to cover the same area and is less expensive than sputtering method. The thermal method described herein to prepare DSA type electrodes of RuO2-ZrO2 doped with Sb2O5 over titanium plates needs no sophisticated equipment as spray pyrolysis technique does; a muffle, ultrasonic equipment, and a hot plate magnetic stirrer are the principal apparatus necessary to carry out the adapted Pechini method. On the other hand, this method allows metal oxides to disperse homogeneously. The cyclic voltammograms showed the stability of DSA, and the accelerated life test allowed establishing its useful life (18.18 years) at a current density of 10 mA cm-2.
关键词： Zirconium oxide ZrO2,thermal method,polymer mixture,Dimensionally Stable Anode,pretreatment of the titanium,metallic precursors,Antimony oxide Sb2O5,Ruthenium oxide RuO2
更新于2025-09-10 09:29:36
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Nucleation-Limited Ferroelectric Orthorhombic Phase Formation in Hf <sub/>0.5</sub> Zr <sub/>0.5</sub> O <sub/>2</sub> Thin Films
摘要： Various possibilities have been proposed as the cause of the doped- or undoped-HfO2 thin film materials showing unusual ferroelectricity. These assumptions are based on empirical results, yet finding the origin of the unprecedented ferroelectricity within HfO2 has suffered from a serious gap between its theoretical calculation, mostly based on thermodynamic approach and the actual experimental results. To fill the gap, this study proposes to consider the kinetic energy, providing the evidence of the kinetic energy barrier upon a phase transformation from the tetragonal phase to the monoclinic phase affected by the TiN top electrode (capping layer). 10 nm thick Hf0.5Zr0.5O2 thin films are deposited and annealed with or without the TiN capping layer with subsequent annealing at different time and temperature. Arrhenius plot is constructed to obtain the activation energy for the tetragonal-to-monoclinic phase transformation by calculating the amount of the transformed phase using X-ray diffraction pattern. Johnson–Mehl–Avrami and nucleation-limited transformation models are utilized to describe the characteristic nucleation and growth time and calculate the activation energy for the monoclinic phase transformation of the Hf0.5Zr0.5O2 thin film. Both models demonstrate that the TiN capping layer provides a kinetic energy barrier for tetragonal-to-monoclinic phase transformation and enhances the ferroelectric property.
关键词： ferroelectric thin films,hafnium zirconium oxide,activation energy,nucleation-limited transformation,nucleation and growth transformation kinetics
更新于2025-09-04 15:30:14