研究目的
To demonstrate narrow-line green laser emission at 513.85 nm with a linewidth of 31 pm and side-mode suppression ratio of 36.9 dB, operating under continuous-wave injection at room temperature, by integrating a 40th-order DFB surface grating onto an InGaN-based LD.
研究成果
The integration of a 40th-order DFB surface grating onto an InGaN-based LD by maskless etching with an FIB demonstrated 14 mW narrow-line emission with a FWHM of 31 pm and SMSR of 36.9 dB at green wavelengths. This paves the way for future development of single-wavelength green LDs.
研究不足
The optical performance of the device was compromised, with a decrease in optical power and efficiency. Improvements can be expected from future detailed optimization of fabrication parameters.
1：Experimental Design and Method Selection:
A high-order (40th) distributed-feedback surface grating was fabricated on multimode InGaN-based green laser diodes via a focused ion beam.
2：Sample Selection and Data Sources:
The green LD (Osram PLP520) with a Fabry–Perot (FP) ridge-waveguide was used.
3：List of Experimental Equipment and Materials:
Focused ion beam (FEI Helios NanoLab 650), Keithley 2520 system, silicon photodetector, integrating sphere (Labsphere), thermoelectric cooler (TEC) and TEC controller (Thorlabs ITC 4005), high-resolution spectrum analyzer (Yokogawa AQ6370B).
4：Experimental Procedures and Operational Workflow:
The DFB grating was fabricated on the LD, and electro-optical characterization was conducted in continuous-wave current injection.
5：Data Analysis Methods:
The spectral emission was analyzed to determine the effectiveness of the DFB grating.
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Focused ion beam
FEI Helios NanoLab 650
FEI
Fabrication of the DFB grating on the LD
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Keithley 2520 system
2520
Keithley
Electro-optical characterization
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Thermoelectric cooler
ITC 4005
Thorlabs
Temperature stabilization
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High-resolution spectrum analyzer
AQ6370B
Yokogawa
Spectral measurements
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Silicon photodetector
Detection of optical power
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Integrating sphere
Labsphere
Measurement of optical power
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Beam-pro?ler CCD camera
SP620U
Ophir Spiricon
Recording of the laser beam profile
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