研究目的
To improve optical properties without deteriorating the electrical characteristics for micro-LEDs by incorporating textured sidewalls and composite concave-convex circular snowflake-like p-electrode.
研究成果
The hybrid structure combining concave-convex circular composite textured sidewalls and snowflake-like p-electrode significantly improves light output power and reduces voltage in micro-LEDs, making it a promising solution for highly efficient micro-LEDs.
研究不足
The study focuses on specific p-electrode patterns and sidewall structures; other configurations may yield different results. The impact of manufacturing variations was minimized by using uniform epitaxial material and structure.
1：Experimental Design and Method Selection:
The study involved the preparation of micro-LEDs with different p-electrode patterns and sidewall structures to investigate their effects on performance.
2：Sample Selection and Data Sources:
Epitaxial wafers with a peak wavelength of 457 nm were used.
3：List of Experimental Equipment and Materials:
Inductively coupled plasma (ICP) etching, scanning electron microscope (SEM), semiconductor parameter analysis system including integral sphere (QUATEK PG2101).
4：1). Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The process included epitaxial wafer preparation, ITO layer deposition, ICP etching for sidewall and mesa definition, SiO2 layer deposition, and electrode deposition.
5：Data Analysis Methods:
Electrical and optical properties were analyzed using a semiconductor parameter analysis system.
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