研究目的
To improve the light efficiency of micro-LEDs by using concave-convex circular composite structure sidewalls prepared by ICP etching without deteriorating the electrical characteristics.
研究成果
The concave-convex circular composite structure sidewall is an effective approach for increasing the photons emitting from the GaN sidewalls, improving the light output power by 7.2% without deteriorating the electrical characteristics. This method is promising for high-efficiency micro-LED applications.
研究不足
The study focuses on the enhancement of light extraction efficiency through sidewall modification but does not explore the impact on other LED performance metrics such as color rendering index or thermal management.
1：Experimental Design and Method Selection:
The study involved preparing concave-convex circular composite structure sidewalls on InGaN based blue micro-LEDs using ICP etching to enhance light extraction efficiency.
2：Sample Selection and Data Sources:
InGaN based blue micro-LEDs with a peak wavelength of 457 nm were used.
3：List of Experimental Equipment and Materials:
Equipment included ICP etching tools, SEM for analysis, and a semiconductor parameter analysis system with an integrating sphere for measurements.
4：Experimental Procedures and Operational Workflow:
The process involved depositing an ITO current spreading layer, defining mesa regions and sidewall structures via ICP etching, depositing a SiO2 passivation layer, and finally depositing multi-layer metals as electrodes.
5：Data Analysis Methods:
The study analyzed J-V and J-LOP characteristics, and used FDTD simulation to understand light extraction mechanisms.
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