研究目的
To overcome the challenge of weak light–matter interactions in graphene due to its atomic thickness by proposing and demonstrating graphene-on-silicon photonic integrated circuits (PICs) for enhanced interactions and to explore new on-chip applications beyond traditional silicon photonic technology.
研究成果
Graphene-on-silicon PICs offer a promising platform for enhancing light–matter interactions and developing new on-chip applications. Despite rapid development, there is significant room for improvement in fabrication techniques, device performance, and exploration of nonlinear optical applications. The integration of graphene with silicon PICs opens new avenues for hybrid optoelectronic integration and applications.
研究不足
The study faces challenges in the direct deposition of high-quality graphene on dielectric materials, manual transfer processes introducing uncertainty, and the working bandwidth of demonstrated graphene optoelectronic devices being slower than state-of-the-art group-IV-semiconductor-based devices. Applications of graphene-on-silicon PICs in nonlinear optics and waveguide-integrated graphene biochemical sensors are still in their infancy.
1：Experimental Design and Method Selection:
The study involves the integration of graphene on silicon waveguides to enhance light–matter interactions through in-plane evanescent–field coupling. Theoretical principles and fabrication processes of graphene-on-silicon PICs are introduced.
2：Sample Selection and Data Sources:
Exfoliated graphene and chemical vapor deposition (CVD)-grown graphene are chosen for integration on fabricated silicon PICs. Commercially available CVD-grown graphene-on-copper foils are used.
3：List of Experimental Equipment and Materials:
Silicon waveguides, graphene layers, PMMA for graphene transfer, ammonium persulfate for copper etching, acetone for PMMA removal, and various CMOS-compatible fabrication techniques like electron-beam lithography and deep reactive-ion etching.
4：Experimental Procedures and Operational Workflow:
Fabrication processes include wet transferring a CVD-grown graphene layer to a silicon PIC, integrating graphene with silicon waveguides, and characterizing the devices.
5：Data Analysis Methods:
The performance of graphene-on-silicon PICs is analyzed through measurements of optical absorption coefficients, modulation bandwidth, and responsivity of photodetectors.
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