研究目的
To meet the demands of optical interconnect systems and fast-growing data communications exceeding 100 Gbits/s, low-cost, low-power, and high-speed optical components must be developed.
研究成果
The optimal length of the germanium layer for high-performance waveguide photodetectors is 8 μm. For the 4 × 8 μm2 photodetector, at a bias of ?1 V, the dark current density is approximately 5 mA/cm2 and the 1550 nm optical responsivity is as high as 0.82 A/W. The ?3 dB bandwidth is as high as 29 GHz at ?4 V. Clear opened eye diagrams are obtained at 50 Gbits/s.
研究不足
The length of the germanium layer on the device can neither be too long nor too short for high-speed germanium waveguide photodetectors on Si.
1：Experimental Design and Method Selection:
Germanium waveguide photodetectors with various lengths are fabricated on silicon-on-insulator substrates by selective epitaxial growth. The dependence of the germanium layer length on the responsivity and bandwidth of the photodetectors is studied.
2：Sample Selection and Data Sources:
The devices were installed on an SOI substrate with a 220-nm-thick Si top layer and a 2-μm-thick buried oxide layer.
3：List of Experimental Equipment and Materials:
Agilent B1500A semiconductor parameter analyzer, Santec tunable semiconductor laser (TSL-550), Agilent LCA N4373D, Keithley 2611A system source meter, LiNbO3 modulator.
4：Experimental Procedures and Operational Workflow:
The ??–?? characteristics of the photodetectors with and without incident light were measured. High-frequency characteristics of the photodetectors were measured using the Agilent 67 GHz lightwave-component-analyzer (LCA) N4373D.
5：3D. Data Analysis Methods:
5. Data Analysis Methods: The optical responsivity ?? can be calculated using the equation ?? = (??light ? ??dark)/??. The bandwidth of a germanium photodetector is mainly dominated by the carrier transit-time-limited bandwidth ??T and RC-limited bandwidth ??RC in the active region.
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Keithley 2611A system source meter
2611A
Keithley
Applying bias voltage to the photodetectors
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Agilent B1500A semiconductor parameter analyzer
B1500A
Agilent
Measuring the ??–?? characteristics of the photodetectors
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Santec tunable semiconductor laser
TSL-550
Santec
Providing incident light for the photodetectors
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Agilent LCA N4373D
N4373D
Agilent
Measuring high-frequency characteristics of the photodetectors
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LiNbO3 modulator
Generating optical nonreturn-to-zero (NRZ) pseudo-random bit sequence data pattern
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