研究目的
To demonstrate a fiber-optic Fabry-Perot pressure sensor with embedded MEMS micro-cavity for ultra-high pressure detection.
研究成果
The fiber optic Fabry-Perot pressure sensor with embedded MEMS micro-cavity demonstrated good performance for ultra-high pressure detection, with full-scale errors less than 0.079%F.S., pressure sensitivity of 1.071rad/MPa, hysteresis error of 1.397%, and a transient response time of 0.27s. It is suitable for applications in deep-sea and oil exploration.
研究不足
The paper does not explicitly mention limitations, but the focus is on ultra-high pressure detection, which may imply limitations in lower pressure ranges or other environmental conditions not tested.