研究目的
Investigating the transition from classical field emission to plasma discharges and the possibility of the miniaturization of technical applications.
研究成果
The miniaturization of DBD actuators and the use of field emitter arrays significantly reduce the ignition voltage of plasma discharges by up to 33%. This advancement enables more stable and efficient micro plasma generation, with potential applications in various scientific and engineering fields.
研究不足
The study is limited to measurements at atmospheric pressure initially, with proposed further measurements at lower and vacuum pressures. The degeneration of b-Si structures at higher voltages limits the operational range of the actuators.
1：Experimental Design and Method Selection:
The study involves the design and fabrication of micro plasma actuators based on the concept of conventional macroscopic dielectric barrier discharge (DBD) combined with field emission optimized nanostructures.
2：Sample Selection and Data Sources:
The experiments use miniaturized DBD actuators on a 500 μm borofloat glass dielectric substrate and further downscaled actuators with a cross section of only 100 μm.
3：List of Experimental Equipment and Materials:
A function generator with a frequency range from 1 Hz to 1 kHz, a high voltage amplifier producing voltages up to 10 kV, a Ragowski coil for current measurement, and a 3 GHz bandwidth oscilloscope for monitoring.
4：Experimental Procedures and Operational Workflow:
Plasma is generated at atmospheric pressure and measurements are performed to characterize the electrical properties of the plasma discharge.
5：Data Analysis Methods:
The applied voltage, measured current, and calculated electrical power are monitored and analyzed to determine the ignition voltage and power requirements.
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