研究目的
Investigating the effect of annealing treatment on the structural, electrical, and optical properties of hydrated magnesium-carbon films as a substitute for traditional transparent conductive oxides (TCO).
研究成果
Annealing treatment improves the electrical and optical properties of hydrated magnesium-carbon films, making them a potential substitute for traditional TCO materials in optoelectronic devices, particularly in the far-infrared wavelength range. The films exhibit low resistivity and high transmittance in both visible and infrared spectra.
研究不足
The conductivity of hydrated magnesium-carbon films is less than conventional TCO materials, such as In2O3 or CdO. The study focuses on the effect of annealing treatment and does not explore other potential doping or treatment methods.
1：Experimental Design and Method Selection:
The three-step method was used to prepare and anneal the hydrated magnesium-carbon films. Mg and C targets were used to deposit Mgx-Cy films on quartz, single crystal silicon, and ZnS by magnetron co-sputtering. The films were then reacted with water vapor and annealed at various temperatures and times in an argon atmosphere.
2：Sample Selection and Data Sources:
Films were deposited on quartz, single crystal silicon, and ZnS substrates. The effect of annealing treatment on the crystal structure, surface morphology, and electronic and optical properties was studied.
3：List of Experimental Equipment and Materials:
Mg (99.99% purity) and C (99.99% purity) targets, magnetron co-sputtering system, reactor for water vapor reaction, annealing furnace.
4：99% purity) and C (99% purity) targets, magnetron co-sputtering system, reactor for water vapor reaction, annealing furnace.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Deposition of Mgx-Cy films, reaction with water vapor, annealing treatment, characterization of structural, electrical, and optical properties.
5：Data Analysis Methods:
X-ray diffraction (GIXRD), scanning electron microscopy (SEM), fourier transform infrared spectroscopy (FTIR), ultravioletevisible spectrophotometry, hall measurements.
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