研究目的
To demonstrate a hydrophobic polymer encapsulation technique for black phosphorus (BP) transistors that improves their performance and reliability under high current densities by preventing degradation and oxidation while retaining high electric performance.
研究成果
The PHMA-co-PS encapsulation technique significantly improves the performance and reliability of BP transistors under high current densities, with enhanced on-off ratios, breakdown voltage, and stability. This method offers a promising approach for practical applications of BP in electronic and optoelectronic devices.
研究不足
The study focuses on the encapsulation's effect on BP transistors' electrical properties and reliability but does not extensively explore the long-term stability under various environmental conditions beyond ambient air. The comparison is limited to Al2O3 and PHMA-co-PS encapsulation methods.
1:Experimental Design and Method Selection:
The study involves the fabrication of BP back-gate transistors with channel lengths from
2:16 to 2 μm on HfSiO dielectric on Si substrate. Two encapsulation methods are compared:
Al2O3 deposited by ALD and PHMA-co-PS polymer spin-coated onto the devices.
3:Sample Selection and Data Sources:
Few-layer BP flakes were mechanically exfoliated from bulk crystal and transferred onto the substrate. Electrical measurements were conducted in vacuum.
4:List of Experimental Equipment and Materials:
Equipment includes a Lakeshore probe station, Agilent B1500A semiconductor parameter analyzer, and atomic force microscope (AFM). Materials include BP flakes, HfSiO dielectric, Ni/Au metal contacts, Al2O3, and PHMA-co-PS polymer.
5:Experimental Procedures and Operational Workflow:
The process involves exfoliating BP flakes, fabricating transistors, applying encapsulation layers, and conducting electrical measurements at temperatures from 300 to 20 K.
6:Data Analysis Methods:
The analysis includes comparing transfer characteristics, output characteristics, on-off ratios, and breakdown voltages before and after encapsulation.
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