研究目的
To review the functionalization of fine primary particles by atomic layer deposition, covering its history, processing methods, coating of various particles, and applications.
研究成果
Particle ALD enables precise, conformal coating of primary particles with nanothick films, offering applications in passivation, catalysis, batteries, and more. It is a low-cost process with high precursor efficiency. Future research should focus on continuous processing and expanding commercial applications.
研究不足
The review highlights challenges such as the need for agitated processing to avoid agglomeration, temperature sensitivity for polymer coatings, and the initial non-uniformity of films during nucleation. Scaling to continuous processes and handling large quantities of fine powders are noted as areas for optimization.
1：Experimental Design and Method Selection:
The paper reviews various agitated particle bed reactors (e.g., fluidized beds, rotary reactors) for particle ALD, utilizing sequential self-limiting surface reactions. Methods include ALD and MLD for coating inorganic, polymer particles, nanoparticles, and nanotubes.
2：Sample Selection and Data Sources:
Samples include iron particles, boron nitride particles, silica nanoparticles, zirconia nanoparticles, polymer particles (e.g., LDPE, HDPE), carbon nanotubes, and others from cited studies.
3：List of Experimental Equipment and Materials:
Equipment includes fluidized bed reactors, rotary reactors, mass spectrometers, TEM, HRTEM, FESEM, EDS, XPS, FTIR, ICP-OES, TGA. Materials include precursors like TMA, H2O, BCl3, NH3, DEZ, TTIP, H2O2, WF6, Si2H
4：Experimental Procedures and Operational Workflow:
Procedures involve sequential dosing of precursors in agitated reactors, monitoring with mass spectrometry, characterization with microscopy and spectroscopy techniques, and performance testing (e.g., oxidation resistance, photocatalytic activity).
5：Data Analysis Methods:
Analysis includes measuring film thickness, composition, surface area, particle size distribution, and performance metrics using techniques like TEM, XPS, FTIR, and electrochemical testing.
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Fluidized Bed Reactor
Used for agitated particle processing in ALD to coat particles without agglomeration.
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Mass Spectrometer
Used downstream to monitor ALD chemistry and precursor usage.
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Transmission Electron Microscope
HRTEM
Used for high-resolution imaging to verify film conformity and thickness.
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Scanning Electron Microscope
FESEM
Used for imaging particle surfaces and cross-sections.
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X-ray Photoelectron Spectrometer
XPS
Used for surface composition analysis.
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Fourier Transform Infrared Spectrometer
FTIR
Used for in situ and ex situ analysis of surface reactions and film composition.
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Inductively Coupled Plasma Optical Emission Spectrometer
ICP-OES
Used for elemental analysis of coated particles.
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Thermogravimetric Analyzer
TGA
Used for oxidation resistance testing of coated particles.
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Energy-Dispersive X-ray Spectrometer
EDS
Used for elemental mapping and composition analysis.
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Rotary Reactor
Alternative to fluidized bed for particle ALD processing.
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