研究目的
To improve the HPHT method for the growth of high-quality diamond crystals of IIb type and to study their semiconductor properties.
研究成果
High-quality boron-doped diamond crystals with low compensation ratios and high mobility can serve as reference semiconductors. Schottky barrier diodes fabricated on these substrates show good performance up to 250°C with high current and voltage capabilities.
研究不足
Nonuniformity in samples with low boron concentration affects measurement accuracy. Extended defects can lead to incorrect analysis of Hall effect data. The study is limited to boron-doped diamonds and specific growth conditions.
1:Experimental Design and Method Selection:
Diamond crystals were grown using the high-pressure high-temperature (HPHT) method with a temperature gradient on seed crystals. Electrical properties were studied using the Hall effect method (van der Pauw procedure) and capacitance–voltage characteristics.
2:Sample Selection and Data Sources:
Boron-doped diamond single crystals with concentrations varied from
3:0004 to 04 at % boron in the growth mixture. Samples were cut into plates with {001} orientation, polished, and etched. List of Experimental Equipment and Materials:
Laser for cutting plates, X-ray topography and UV luminescence mapping equipment, magnetron sputtering for contacts, annealing furnace, LakeShore HMS 7708 measuring system for Hall effect, Keithley 4200-SCS for capacitance–voltage measurements, microwave plasma CVD (MPCVD) system for film growth.
4:Experimental Procedures and Operational Workflow:
Crystals grown at
5:5 GPa and about 1700 K. Plates cut and polished. Ohmic and Schottky contacts fabricated. Electrical measurements performed in temperature range 77–800 K. CVD layers grown for diode fabrication. Data Analysis Methods:
Regression analysis of Hall effect data using least squares method, modeling of mobility with scattering mechanisms, and analysis of capacitance–voltage characteristics.
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LakeShore HMS 7708
HMS 7708
LakeShore
Measuring system for Hall effect measurements
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Keithley 4200-SCS
4200-SCS
Keithley
System for capacitance–voltage characteristics measurements
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Laser
Cutting diamond plates
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Magnetron sputtering system
Fabrication of ohmic and Schottky contacts
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Microwave plasma CVD system
MPCVD
Growth of diamond films
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X-ray topography equipment
Imaging for defect analysis
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UV luminescence mapping equipment
Mapping for defect analysis
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