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oe1(光电查) - 科学论文

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出版时间
  • 2018
研究主题
  • Multi-input and multi-output
  • half adder
  • DEMUX
  • electrostatic and electrothermal actuation
  • MEMS resonators
应用领域
  • Optoelectronic Information Science and Engineering
机构单位
  • King Abdullah University of Science and Technology
120 条数据
?? 中文（中国） ▾

  • Study on a high-temperature optical fiber F–P acceleration sensing system based on MEMS

    摘要： Vibration measurement at high temperature is of great signi?cance to monitoring the operation of major projects and mechanical equipment. As the temperature resistance of electrical vibration sensors is usually below 600 °C, it cannot meet the requirements of some high-temperature measuring conditions. This paper studies a high-temperature Fabry–Perot (F–P) acceleration sensing system with general single-mode ?ber. A high-temperature sensitive diaphragm is machined based on micro-electromechanical system (MEMS) technology and it is combined with the ?ber microstructure to enable the sensing probe to be packaged under high temperatures. According to the temperature characteristic of the length of the F–P cavity, a signal demodulation system was proposed based on the rapid automatic tracking of the quiescent operation point. The complete optical ?ber F–P acceleration sensing system conducted real-time vibration detection of high temperature casting in the foundry factory. The experimental result indicates that the optical ?ber high-temperature acceleration sensor showed a better vibration response in the working frequency of 100–1000 Hz and the relative error of the frequency measurement is less than 1.56% under normal temperatures and a high temperature of 800 °C.

    关键词： Optical ?ber F–P,High-temperature,Acceleration sensor,Tunable laser source,MEMS

    更新于2025-11-28 14:23:57

  • An Optical MEMS Acoustic Sensor Based on Grating Interferometer

    摘要： Acoustic detection is of great signi?cance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 μm deep cavity and 2.4 μm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to ?15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 ?C to 55 ?C.

    关键词： interferometry,stability,acoustic sensors,MEMS,grating

    更新于2025-11-28 14:23:57

  • Effect of Dielectric Charging on Capacitance Change of an SOI Based CMUT

    摘要： Effect of dielectric charging on the performance of SOI based Capacitive Micromachined Ultrasonic Transducers (CMUT) has been investigated. Measurements on an SOI based CMUT show that that the capacitance change as a function of DC bias is considerably higher than analytically calculated values. Investigation shows that this deviation in capacitance from analytically calculated values is due to the combined effects of different dielectric charging phenomena due to a strong electric field, trap charges in the SOI oxide layer, the charge motion associated with the leakage current through the buried oxide layer, and the air in the CMUT cavity. Additionally, this charging effect degrades the transduction efficiency as the induced polarization reduced the effective bias across the CMUT. It is concluded that the buried oxide (BOX) layers in SOI wafers are not suitable for use as dielectric spacers in electrostatic MEMS devices.

    关键词： SOI,dielectric charging,Capacitance,microfabrication,MEMS,CMUT,leakage current

    更新于2025-11-14 17:28:48

  • A MEMS BPSK to ASK converter

    摘要： Purpose – The purpose of this paper is to investigate the feasibility of using micro electromechanical systems (MEMS) to convert a binary phase shift keying (BPSK) signal to a simpler amplitude shift keying (ASK) scheme. Design/methodology/approach – The prototype is designed within the SOIMUMPs? fabrication process constraints. The fabrication constraints imposed geometric limitations on what could be tested. These constraints were used to build a mathematical model, which in turn was used to optimize the response using MATLAB?. The optimized design was tested using ?nite element analysis with CoventorWare?, and ?nally lab tests on the fabricated device were performed to con?rm theoretical predictions. Findings – Theoretical predictions compared well with lab measurements on a prototype device measuring 2.9 mm2. The prototype was tested with a carrier frequency of 174 kHz at a BPSK data rate of 3 kHz and carrier amplitude of 6 V. With these parameters, ASK modulation indices of 0.96 and 0.94 were measured at the two output sensors. Originality/value – This study provides a MEMS solution for BPSK to ASK conversion. The study also identi?es what limits betterment of the modulation index and data rate. Such a device has potential application in wireless sensor network (WSN) nodes that have energy harvesters and sensors that are also built in MEMS. Being a MEMS device, it can facilitate integration in such WSN nodes and, hence, potentially reduce size and costs.

    关键词： Modulation index,Mixer,ASK detector,Micro electro mechanical systems (MEMS),BPSK converter

    更新于2025-11-14 17:28:48

  • [IEEE 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Shanghai (2018.8.8-2018.8.11)] 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Polymorphic impedance matching technique for MEMS phase shifter

    摘要： The amplitude and phase consistency control level is an important factor affecting the performance of phased array antenna. MEMS phase shifter has important application potential in phased array antenna, but the current MEMS phase shifter device has poor amplitude and phase consistency, making it difficult to integrate directly in phased array antenna system. In this paper, a novel multi-states matching technology for MEMS phase shifter is proposed to overcome the above-mentioned difficulty. To control amplitude fluctuation and phase shift error of phase shifter in the using process, we proposed a general network design method focusing on the given polymorphic S parameter matrix of MEMS phase shifter based on the theory of microwave network. The key of the method is as following: with the help of the mature microwave network synthesis method and the particle swarm optimization algorithm combined by matching circuit parameter optimization, obtain actual S parameter matrixes of two polymorphic matching networks for the corresponding MEMS phase shifter, so as to enhance the amplitude and phase consistency integrated application. The simulation results verify the feasibility of the method, and so that we form a technical way to improve the consistency of amplitude and phase of MEMS phase shifter system through polymorphic matching network, which has important theoretical and practical value.

    关键词： multi-states,MEMS phase shifter,matching technology

    更新于2025-09-23 15:23:52

  • A Novel Transmitting Module Self-Monitoring Protection System Based On MEMS Sensors and Actuators

    摘要： Design, fabrication, and measurements of a novel transmitting module self-monitoring protection system are presented in this letter. Such a system is based on micro-electromechanical systems (MEMS) sensors and actuators for monitoring and protecting the microwave amplifier circuit. The transmitting module self-monitoring protection system consists of the RF MEMS switches, the directional coupler, and the MEMS power sensors. When the microwave amplifier circuit is at an abnormal state ("open," "short," or "overload"), the transmitting module self-monitoring protection system can isolate the microwave amplifier circuit out of order and reconfigure the transmitting module into impedance matching within 36 ms. When the microwave amplifier circuit is at the overload state, the error between the set switching power and the actual switching power is less than 9%. The measured results agree well with the theory.

    关键词： Microelectromechanical systems (MEMS) power sensor,microwave amplifier circuit,RF MEMS switch,self-monitoring protection

    更新于2025-09-23 15:22:29

  • Monolayer MoS? Strained to 1.3% With a Microelectromechanical System

    摘要： We report on a modified transfer technique for atomically thin materials integrated into microelectromechanical systems (MEMS) for studying strain physics and creating strain-based devices. Our method tolerates the non-planar structures and fragility of MEMS while still providing precise positioning and crack-free transfer of flakes. Furthermore, our method used the transfer polymer to anchor the 2D crystal to the MEMS, which reduces the fabrication time and increases the yield, and allowed us to exploit the strong mechanical coupling between the 2D crystal and polymer to strain the atomically thin system. We successfully strained single atomic layers of molybdenum disulfide (MoS2) with MEMS devices for the first time and achieved greater than 1.3% strain, marking a major milestone for incorporating 2D materials with MEMS. We used the established strain response of MoS2 Raman and photoluminescence spectra to deduce the strain in our crystals and provide a consistency check. We found good comparison between our experiment and the literature.

    关键词： photoluminescence,Raman,strain,monolayer MoS2,MEMS

    更新于2025-09-23 15:22:29

  • [IEEE 2018 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) - Saint-Petersburg, Russia (2018.11.26-2018.11.30)] 2018 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) - MEMS Accelerometer with SAW

    摘要： was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.

    关键词： microaccelerometer with SAW,slaser stimulated plasma etching,MEMS technology

    更新于2025-09-23 15:22:29

  • [IEEE 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Qingdao, China (2018.10.31-2018.11.3)] 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Design of a flexible MEMS pressure sensor array in dog’s artificial knee joint

    摘要： This paper proposed a novel design of flexible sensor array which can be applied to measure the pressure distribution in the dog’s artificial knee joint after the Total Knee Arthroplasty(TKA). Using MEMS technology, the flexible sensor array mainly consists of 100 sensing points which are fabricated based on SOI, and spin-coated polyimide(PI) films. It is strongly attached to the surface of polyethylene insert in the dog’s artificial knee joint. The flexible MEMS sensor array is biocompatible for vivo animal experiment and expected to play an important role in the research of improving the surgery effect of TKA.

    关键词： flexible pressure sensor,MEMS,artificial knee joint

    更新于2025-09-23 15:22:29

  • Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

    摘要： This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special attention is paid to alkali atom introduction methods and sealing of the MEMS structure. Characteristics of each technology are collated and compared. The article’s rhetoric is guided by the proposed classification of MEMS cell fabrication methods and contains a historical outline of MEMS cell technology development.

    关键词： MEMS cells,atomic references,microfabrication,frequency standards

    更新于2025-09-23 15:22:29