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Electrical Properties of Indium-Oxide Thin Films Produced by Plasma-Enhanced Reactive Thermal Evaporation
摘要： The structure and electrical properties of transparent indium-oxide thin films produced by plasma-enhanced reactive thermal evaporation at different substrate temperatures are studied. It is found that the films have a grained structure. An increase in the substrate temperature yields a considerable increase in the conductivity of the films and a decrease in the photoconductivity-relaxation time. An interpretation of the effect of the substrate temperature on the observed changes in the electrical and photoelectric properties of the indium-oxide films under study is proposed.
关键词： indium-oxide thin films,electrical properties,substrate temperature,photoconductivity,plasma-enhanced reactive thermal evaporation
更新于2025-09-11 14:15:04
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Strategies for Reducing Particle Defects in Ti and TiN Thin-Film Deposition Processes
摘要： Generation of particle defects in semiconductor manufacturing is inevitable, but it has to be minimized to enhance IC yield. There are various causes for the generation of particle defects in different semiconductor manufacturing processes, such as diffusion, thin-film deposition, lithography, etch, and clean. In this work, primary defect generation mechanisms in thin-film deposition processes, such as ALD TiN, RFPVD Ti, and PVD TiN, are discussed. Various strategies, such as periodic clean optimization, on-load clean, idle pasting, periodic pasting optimization, kit life optimization, target burning optimization, and kit hardware selection that reduce the generation of defects in the thin-film deposition processes are presented. This work also discusses hardware-induced surface defect and solutions to reduce them.
关键词： Conductive films,IC manufacturing,Metallic materials,Contamination free manufacturing,Thin films
更新于2025-09-10 09:29:36
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Effect of annealing treatment on transparent and conductive hydrated magnesium-carbon films
摘要： Transparent electronic technology has many urgent optoelectronic device applications. A key component of plasmonic materials in conventional semiconductors is the wide band gap of oxide thin films. Although transparent electronic materials have been developed for visible and near-infrared wavelengths, systems incorporating mid-infrared and far-infrared spectra are difficult to achieve. In this study, hydrated magnesium-carbon films, a new type of non-oxide transparent conductive thin films with a magnesium hydroxide structure, were generated using the three-step method. After annealing treatment, larger crystals in the thin films typically exhibited superior film resistivity, with conductivity values of approximately 8.63 × 10?3 Ω m. Due to the free electron concentration was not more than 1020 cm?3, the films demonstrated excellent optical properties, with plasma wavelength values of approximately 8 mm for infrared transmittance above 70%. After annealing, due to the Moss-Burstein (M-B) effect, the visible light transmittance was greater than 85% and the optical bandgap shifted towards the blue region. In addition, the influences of the sputtering power of the carbon target on the properties of hydrated magnesium-carbon film were also discussed in this paper.
关键词： Transparent conductive films,Electrical properties,Magnetron sputtering,Hydrated magnesium-carbon films
更新于2025-09-10 09:29:36
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[IEEE 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Budapest (2018.7.1-2018.7.5)] 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Vibration energy harvesting with stretchable electrets
摘要： Motivated by the demand for self-powered portable wearable electronics systems and self-actuated wireless sensors, the development of the energy harvesters that can convert ambient energy into electricity is of great interest. In this study, we fabricated energy harvesters based on stretchable wave-shaped fluorinated ethylene propylene (FEP) electret films using a predesigned bi-stable structure. The energy harvesting performance of the devices with a length of 30 mm and a width of 10 mm was investigated in a stretching mode at various exciting frequencies, load resistances, seismic masses and surface potentials of FEP electrets films. Using 12.5 μm thick wavy FEP electrets with a surface potential of -500 V and a seismic mass of 3 g cemented on the center of the harvester, the generated power across the optimal load resistance amounts to 355 μW at 22 Hz for an input acceleration of 1 g. (g is the gravity of the earth).
关键词： electrostatic energy harvester,wavy structure,stretchable FEP electret films
更新于2025-09-10 09:29:36
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Nanocarbon colloid produced by electro-spark discharge in ethanol for seeding the substrates in MPACVD synthesis of polycrystalline diamond films
摘要： We produced a nanocarbon colloid by electro-spark discharge as substrate seeding for microwave plasma-assisted chemical vapor deposition (MPACVD) synthesis of micro- and nano-crystalline diamond films and solid free-standing microcrystalline diamond plates. The colloid was produced by a specially designed device via a pulse electro-spark discharge in ethanol. The nanocrystalline diamond films and polycrystalline plates that were grown were examined by optical, SEM and TEM microscopies and Raman spectroscopy.
关键词： MPACVD,electro-spark discharge,nanocarbon colloid,polycrystalline diamond films
更新于2025-09-10 09:29:36
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Silicon Oxide-Rich Diamond-Like Carbon: A Conformal, Ultrasmooth Thin Film Material with High Thermo-Oxidative Stability
摘要： Silicon oxide-containing diamond-like carbon (a-C:H:Si:O) films are a promising class of protective coatings for environmentally-demanding applications owing to their lower residual stresses and superior thermal stability and oxidation resistance relative to undoped diamond-like carbon. However, existing versions of a-C:H:Si:O deposited by traditional methods such as plasma-enhanced chemical vapor deposition (PECVD) undergo substantial degradation and oxidation at temperatures above 250 °C. This, together with the difficulty of PECVD in depositing conformal coatings on complex geometries such as high-aspect-ratio features, has limited the applicability of a-C:H:Si:O. Here, the unique capabilities of plasma immersion ion implantation and deposition (PIIID) to grow silicon oxide-rich diamond-like carbon materials that are ultrasmooth, continuous, and conformal on high-aspect-ratio topographies are explored. The high concentration of silicon and oxygen in PIIID-grown films (23 ± 5 at.% and 11 ± 4 at.%, respectively) is unrivalled for this class of materials, and drastically increases the resistance to oxidation at high temperatures, compared with PECVD-grown films. The results open the path for using a-C:H:Si:O in applications involving exposure of materials to extreme environments.
关键词： ultrasmooth films,X-ray photoelectron spectroscopy (XPS),diamond-like carbon,NEXAFS,thermal stability
更新于2025-09-10 09:29:36
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Improved resistive switching performance in Cu-cation migrated MoS2 based ReRAM device incorporated with tungsten nitride bottom electrode
摘要： The resistive switching characteristics of sputtered deposited molybdenum disulphide (MoS2) thin film has been investigated in Cu/MoS2/W2N stack configuration for Resistive Random Access Memory (ReRAM) application. The benefits of incorporating tungsten nitride (W2N) as a bottom electrode material were demonstrate by stability in operating voltages, good endurance (103 cycles) and long non-volatile retention (103 s) characteristics. Resistive switching properties in Cu/MoS2/W2N structure are induced by the formation/disruption of Cu conducting filaments in MoS2 thin film. Ohmic law and space charge limited current (SCLC) are observed as dominant conduction mechanism in low resistance state (LRS) and high resistance state (HRS) respectively. This study suggests the application of MoS2 thin films with W2N bottom electrode for next generation non-volatile ReRAM application.
关键词： Conducting filament,Resistive switching,Molybdenum disulphide,Thin films,Tungsten nitride
更新于2025-09-10 09:29:36
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[IEEE IGARSS 2018 - 2018 IEEE International Geoscience and Remote Sensing Symposium - Valencia, Spain (2018.7.22-2018.7.27)] IGARSS 2018 - 2018 IEEE International Geoscience and Remote Sensing Symposium - Statistical Analysis of Eddies in the Western Mediterranean Based on Multiple SAR Imagery
摘要： We inferred spatial densities of submesoscale eddies in the Western Mediterranean from EnviSat ASAR and Sentinel-1 SAR-C imagery. The derived normalized eddy densities, i.e. the average numbers of eddy manifestations per SAR image acquired under favorable wind conditions, for the two datasets show some similarities, but they also demonstrate that the observation periods of 2-3 years are not sufficiently long for definite conclusions.
关键词： SAR,Sentinel-1,EnviSat,Marine surface films,Submesoscale eddies
更新于2025-09-10 09:29:36
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Pulsed 70?kV X-ray sensing behavior of Cu2HgI4 thick films
摘要： X-ray photoconductors are widely used in flat panel X-ray detectors in medical and dental imaging systems. In the present work, X-ray photoconductivity measurement of Cu2HgI4 thick film was performed using a real-time intraoral X-ray machine. To perform the sensing measurement, wet chemical derived Cu2HgI4 sample was coated as a thick film by slurry deposition route on top of the tin coated copper patterned electrode. Prior to the sensing measurement, Cu2HgI4 powder sample was characterized using powder X-ray diffraction, scanning electron microscope, energy dispersive x-ray analysis, Fourier transformed infrared spectroscopy and diffused reflectance spectroscopy. These analysis confirms the sample is in single phase with crystallites are in sub-spherical morphologies. The resistance of Cu2HgI4 thick film was measured under the presence and absence of pulsed 70 kV X-ray for various exposure durations from 0.06 to 3.2 s using a Keithley 2450 source meter. Appreciable sensitivity against intraoral pulsed 70 kV X-ray sensing behavior of Cu2HgI4 thick films explore the possibility of utilizing it as a photoconductor for flat panel X-ray imaging detectors.
关键词： X-ray photoconductor,Cu2HgI4,Thick films sensors,Pulsed 70 kV X-ray
更新于2025-09-10 09:29:36
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Synthesis of Ge1?xSnx Alloy Thin Films by Rapid Thermal Annealing of Sputtered Ge/Sn/Ge Layers on Si Substrates
摘要： In this work, nanocrystalline Ge1?xSnx alloy formation from a rapid thermal annealed Ge/Sn/Ge multilayer has been presented. The multilayer was magnetron sputtered onto the Silicon substrate. This was followed by annealing the layers by rapid thermal annealing, at temperatures of 300 ?C, 350 ?C, 400 ?C, and 450 ?C, for 10 s. Then, the effect of thermal annealing on the morphological, structural, and optical characteristics of the synthesized Ge1?xSnx alloys were investigated. The nanocrystalline Ge1?xSnx formation was revealed by high-resolution X-ray diffraction (HR-XRD) measurements, which showed the orientation of (111). Raman results showed that phonon intensities of the Ge-Ge vibrations were improved with an increase in the annealing temperature. The results evidently showed that raising the annealing temperature led to improvements in the crystalline quality of the layers. It was demonstrated that Ge-Sn solid-phase mixing had occurred at a low temperature of 400 ?C, which led to the creation of a Ge1?xSnx alloy. In addition, spectral photo-responsivity of a fabricated Ge1?xSnx metal-semiconductor-metal (MSM) photodetector exhibited its extending wavelength into the near-infrared region (820 nm).
关键词： Raman spectroscopy,Ge-Sn,thin films,sputtering,semiconductors,nanocrystalline,X-ray diffraction,scanning electron microscopy
更新于2025-09-10 09:29:36