研究目的
To study the effect of process parameters of spray pyrolysis on the crystallite size and film thickness of TiO2 films and to develop a mathematical model for predicting these properties.
研究成果
The study successfully deposited TiO2 thin films using a modified spray pyrolysis system and developed a mathematical model to predict crystallite size and film thickness. The model's predictions were in good agreement with experimental results, indicating its potential applicability to other metal oxides and sulfides.
研究不足
The study acknowledges that the droplet size distribution is not uniform, which could affect the accuracy of the model. Additionally, the model's predictions slightly differ from experimental results, possibly due to post-treatment effects on the films.
1：Experimental Design and Method Selection:
The study used a modified spray pyrolysis system to deposit TiO2 thin films on glass substrates. The system was optimized for parameters such as substrate temperature, precursor solution concentration, and distance between nozzle and substrate.
2：Sample Selection and Data Sources:
TiO2 thin films were deposited using Titanium trichloride precursor solutions of varying concentrations (0.075 M, 0.1 M, and 0.125 M) and at different deposition temperatures (350?C, 400?C, and 450?C).
3：075 M, 1 M, and 125 M) and at different deposition temperatures (350?C, 400?C, and 450?C).
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: The setup included an air-assisted spray nozzle, reactor chamber, substrate heater, PID controller, peristaltic pump, and air compressor. The precursor was Titanium trichloride, and the substrate was glass.
4：Experimental Procedures and Operational Workflow:
The precursor solutions were sprayed onto heated glass substrates under controlled conditions. The deposited films were annealed at 500?C for 2 hours to improve crystallinity.
5：Data Analysis Methods:
The crystallite size was calculated using XRD data and the Scherrer’s equation. Film thickness was estimated using the gravito-metric method.
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