- 标题
- 摘要
- 关键词
- 实验方案
- 产品
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Nano- and Microfabrication for Industrial and Biomedical Applications || Micromechanical transducers
摘要： Miniaturized micromechanical-based transducers are applied in many various scientific communities and industries. In this chapter we look into the basic concepts of this extensive and important category of devices using simple components as examples. Transducers come in such extreme diversity that a descriptive overview such as is provided by this book is best taken from the perspective of the user. One of the most easily understood definitions of transducers is that they convert energy from one form into another. This perspective also shows that there is no one single design rule. The designer needs to start from a range of actual conditions to realize the required transduction principle in a given application.
关键词： microfabrication,MEMS,Micromechanical transducers,actuators,sensors
更新于2025-09-23 15:21:01
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[IEEE 2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL) - Sozopol, Bulgaria (2019.9.6-2019.9.8)] 2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL) - Improving Focusing Properties of Gradient Annular Metal Gratings of Terahertz Range
摘要： We report the design, fabrication, and experimental characterization of dense, monolithic, and planar arrays of externally-fed electrospray emitters with an integrated extractor grid and carbon nanotube ?ow control structures for low-voltage and high-throughput electrospray of the ionic liquid EMI-BF4 in vacuum. Microfabricated arrays with as many as 1900 emitters in 1 cm2 were fabricated and tested. Per-emitter currents as high as 5 μA in both polarities were measured, with start-up bias voltages as low as 470 V and extractor grid transmission as high as 80%. Maximum array emission currents of 1.35 mA (1.35 mA/cm2) were measured using arrays of 1900 emitters in 1 cm2. A conformal carbon nanotube forest grown on the surface of the emitters acts as a wicking structure that transports liquid to the emitter tips, providing hydraulic impedance to regulate and uniformize the emission across the array. Mass spectrometry of the electrospray beam con?rms that emission in both polarities is composed of solvated ions, and etching of the silicon collector electrode is observed. Collector imprints and per-emitter current–voltage characteristics for different emitter array sizes spanning three orders of magnitude show excellent emission uniformity across the array. Performance estimates of the devices as nanosatellite thrusters are provided.
关键词： Electrospray,carbon nanotubes,ionic liquid,MEMS,multiplexing,microfabrication
更新于2025-09-23 15:19:57
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Three-Dimensional Laser Printing of Macro-Scale Glass Objects at a Micro-Scale Resolution
摘要： Three-dimensional (3D) printing has allowed for the production of geometrically complex 3D objects with extreme flexibility, which is currently undergoing rapid expansion in terms of materials, functionalities, as well as areas of application. When attempting to print 3D microstructures in glass, femtosecond laser-induced chemical etching (FLICE)—which is a subtractive 3D printing technique—has proved itself a powerful approach. Here, we demonstrate the fabrication of macro-scale 3D glass objects of large heights up to ~3.8 cm with an identical lateral and longitudinal feature size of ~20 μm. The remarkable accomplishment is achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica, which results in depth-insensitive focusing of the laser pulses inside fused silica.
关键词： light-field manipulation,ultrafast laser microfabrication,3D glass printing
更新于2025-09-19 17:13:59
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Versatile direct laser writing of non-photosensitive materials using multi-photon reduction-based assembly of nanoparticles
摘要： Versatile direct laser writing (DLW), not limited by material photosensitivity, offers opportunities for fundamental and technological innovation for micro-/nanofabrication in integrated photonics, electronics and material science. Although DLW has high potential in micro-/nanodevice fabrication, material choice suffers an intrinsic limitation: DLW cannot be applied to non-photosensitive materials. We describe a newly discovered rapid-assembly phenomenon of fine particles based on femtosecond laser multi-photon-reduction in solution. this phenomenon allowed the writing of micropatterns with thick clad layers filled with nanoparticles. We wrote continuous patterns by moving the laser focus even in the case of non-photosensitive material such as Sio2. By transcending the strict material limitation, this novel laser writing process promises to be a powerful tool in a variety of scientific fields.
关键词： direct laser writing,nanoparticles,non-photosensitive materials,multi-photon reduction,microfabrication
更新于2025-09-19 17:13:59
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Characterization of Optical Fibers Directly Embedded on Metal using a Particle Spray based Method
摘要： The double corrugated waveguide (DCW), incorporating a row of metallic pillars on each side of the electron beam, is demonstrated as a promising slow-wave structure for millimeter wave, Ka-band, traveling wave tubes (TWTs). Different configurations, including novel bent couplers with tapered pillars, have been designed, realized, and validated by S-parameter measurements. The design and simulation of a DCW TWT demonstrated very good performance in the frequency band 32–37 GHz. The ease of fabrication and assembly make the DCW a suitable basis for a new generation of millimeter wave TWTs.
关键词： microfabrication,millimeter waves,slow-wave structures (SWSs),Double corrugated waveguide (DCW),traveling wave tubes (TWTs),satellite communications
更新于2025-09-19 17:13:59
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[IEEE 2020 8th International Winter Conference on Brain-Computer Interface (BCI) - Gangwon, Korea (South) (2020.2.26-2020.2.28)] 2020 8th International Winter Conference on Brain-Computer Interface (BCI) - Implementation of multi-connected single-channel functional near-infrared spectroscopy system for hyperscanning study
摘要： A drug delivery system is used for targeting drugs to specific cells. Various drug carriers, that also reduce the side effects of unbound drugs, have been introduced and commercialized in the pharmaceutical field. Among them, synthetic biodegradable polymers have received much attention attributed to their low toxicity, controllable biodegradation rates, manufacturability, and low costs. This paper reviews the salient characteristics of biodegradable polymers as drug carriers and their microfabrication methods. The reviewed microfabrication methods include laser micromachining, rapid prototyping, replication, emulsification, microfluidic fabrication, and X-ray-lithography-based methods. For these microfabrication methods, critical dimensions, feature variety, solvent compatibility, production throughput, and tooling requirements are also summarized.
关键词： poly-capro-lactone (PCL),laser micromachining,emulsification,microfluidics,poly(lactic-co-glycolic acid) (PLGA),biodegradable polymers,Drug delivery systems (DDS),rapid prototyping,replication,x-ray-lithography,microfabrication,drug carriers
更新于2025-09-19 17:13:59
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Fabrication of Silicon Microfluidic Chips for Acoustic Particle Focusing Using Direct Laser Writing
摘要： We have developed a fast and simple method for fabricating microfluidic channels in silicon using direct laser writing. The laser microfabrication process was optimised to generate microfluidic channels with vertical walls suitable for acoustic particle focusing by bulk acoustic waves. The width of the acoustic resonance channel was designed to be 380 μm, branching into a trifurcation with 127 μm wide side outlet channels. The optimised settings used to make the microfluidic channels were 50% laser radiation power, 10 kHz pulse frequency and 35 passes. With these settings, six chips could be ablated in 5 h. The microfluidic channels were sealed with a glass wafer using adhesive bonding, diced into individual chips, and a piezoelectric transducer was glued to each chip. With acoustic actuation at 2.03 MHz a half wavelength resonance mode was generated in the microfluidic channel, and polystyrene microparticles (10 μm diameter) were focused along the centre‐line of the channel. The presented fabrication process is especially interesting for research purposes as it opens up for rapid prototyping of silicon‐glass microfluidic chips for acoustofluidic applications.
关键词： acoustophoresis,acoustofluidics,ultrasound,laser micromachining,particle manipulation,microfabrication
更新于2025-09-16 10:30:52
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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Design and Fabrication of a Coupled Dual-Coil for Fingerprint Sensor Application
摘要： This paper presents a novel concept that uses the mutual inductance of a spiral dual-coil to identify fingerprint patterns. Unlike commercial optical and capacitive sensing technologies, this unique dual-coil design enables the measurement of a fingerprint by the effect of ridges and valleys on electrical impedance. In this study, a typical sensing chip with a 3×128 dual-coil array was fabricated by microfabrication process. The variations of coupling capacitance and mutual inductance were then used to verify the properties of different mediums. The measurement results show that the resonant frequency is produced at 8 MHz, which results in a maximum induced current of 1 mA and a phase shift of 41.3 degrees. Higher conductivity mediums cause larger phase shifts. Sample data resulting from a dual-coil array were successfully used to reconstruct a fingerprint image.
关键词： dual-coil,fingerprint sensor,microfabrication,coupling capacitance,mutual inductance
更新于2025-09-12 10:27:22
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A Fast and Reproducible ELISA Laser Platform for Ultrasensitive Protein Quantification
摘要： Optofluidic lasers are currently of high interest for sensitive, intra-cavity, biochemical analysis. In comparison with conventional methods such as fluorescence and colorimetric detection, optofluidic lasers provide a method for amplifying small concentration differences in the gain medium, thus achieving high sensitivity. Here we report the development of an on-chip ELISA (enzyme-linked immunosorbent assay) laser platform that is able to complete an assay in short amount of time with small sample/reagent volumes, large dynamic range, and high sensitivity. The arrayed micro-scale reaction wells in the ELISA lasers can be microfabricated directly on dielectric mirrors, thus significantly improving the quality of the reaction wells and detection reproducibility. The details of the fabrication and characterization of those reaction wells on the mirror are described and the ELISA laser assay protocols are developed. Finally, we applied the ELISA laser to detecting IL-6, showing that a detection limit of about 0.1 pg/mL can be achieved in 1.5 hours with 15 μL of sample/reagents per well. This work pushes the ELISA laser a step closer to solving problems in real-world biochemical analysis.
关键词： Interleukin-6,Fabry-Perot cavity,Immunoassay,Optofluidic laser,Microfabrication,ELISA
更新于2025-09-12 10:27:22
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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - UV-LED Lithography for Millimeter-Tall High-Aspect Ratio 3d Structures
摘要： This paper introduces a UV-LED lithography system for fabrication of millimeter tall 3-D high-aspect-ratio structures. The proposed system has high intensity collimated light from the light source and a tilt-rotational light propagation at the sample stage to create 3-D light patterns inside a photoresist layer. The lithography system comprises 5-by-5 1.5-W LED array capped with 5° collimated lens, a 4-inch-diameter sample holding plate which can be tilt and rotational, and a microcontroller for the operation of the system. To uniformly distribute the exposed light from the 25 LEDs, the light source was rotated during the exposure process. Two different photosensitive polymers were tested for millimeter tall structures including a widely used negative photoresist, SU-8, and liquid polyurethane, LF55GN. The fabricated millimeter-tall structures include pillars, artistic flowers, microneedle array and a horn structure for an RF antenna.
关键词： Millimeter tall,UV-LED Lithography,3D microfabrication
更新于2025-09-12 10:27:22