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Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces <i>via</i> Single-Pulse Laser Interference
摘要： High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators with few hundred nanometers in diameter. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the pre-deposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication is a step towards a simple realization of spatially invariant metasurface-based devices.
关键词： direct laser interference patterning,metasurfaces,laser-matter interaction,dielectric nanostructures,silicon resonators,multi-beam interference
更新于2025-09-23 15:19:57
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Surface Engineered Colloidal Quantum Dots Toward Complete Green Process
摘要： The rising demand for eradicating hazardous substances in the workplace has motivated vigorous researches on environmentally-sustainable manufacturing processes of colloidal quantum dots (QDs) for their optoelectronic applications. Despite remarkable achievements witnessed in QD materials (e.g., Pb- or Cd-free QDs), the progress in the eco-friendly process is far falling behind and thus the practical use of QDs. Herein, a complete “green” process of QDs, which excludes environmentally unfriendly elements from QDs, ligands, or solvents, is presented. The implant of mono-2-(methacryloyloxy)ethyl succinate (MMES) ligands renders InP/ZnSexS1-x QDs dispersed in eco-friendly polar solvents that are widely accepted in the industry while keeping photophysical properties of QDs unchanged. The MMES-capped QDs show exceptional colloidal stabilities in a range of green polar solvents that permit uniform inkjet printing of QD dispersion. In addition, MMES-capped QDs are also compatible with commercially available photo-patternable resins, and the cross-linkable moiety within MMES further facilitates the achievement in the formation of well-defined, micrometer-scale patterning of QD optical films. The presented materials, all composed of simple, scalable, and environmentally-safe compounds, promise low environmental impact during the processing of QDs, and thus will catalyze the practicable use of QDs in a variety of optoelectronic devices.
关键词： photo-patterning,electroluminescence devices,environmentally friendly processing,inkjet printing,quantum dots
更新于2025-09-23 15:19:57
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Fine metal mask material and manufacturing process for high-resolution active-matrix organic light-emitting diode displays
摘要： Manufacturing fine metal mask (FMM) is one of the biggest hurdles to realize the ultra-high definition (UHD) grade AMOLED displays for smartphone and augmented reality (AR). We have developed the state-of-the-art material and processing technology to achieve 800ppi or higher-resolution FMMs. The Invar thinning and the thermal damage-free laser ablation process realized us achieving the FMM for UHD displays.
关键词： UHD (ultra-high definition),laser patterning,AR (augmented reality),electro-forming,chemical etching,Invar,FMM (fine metal mask)
更新于2025-09-23 15:19:57
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Highly Rectifying Heterojunctions Formed by Annealed ZnO Nanorods on GaN Substrates
摘要： We study the effect of thermal annealing on the electrical properties of the nanoscale p-n heterojunctions based on single n-type ZnO nanorods on p-type GaN substrates. The ZnO nanorods are prepared by chemical bath deposition on both plain GaN substrates and on the substrates locally patterned by focused ion beam lithography. Electrical properties of single nanorod heterojunctions are measured with a nanoprobe in the vacuum chamber of a scanning electron microscope. The focused ion beam lithography provides a uniform nucleation of ZnO, which results in a uniform growth of ZnO nanorods. The specific configuration of the interface between the ZnO nanorods and GaN substrate created by the focused ion beam suppresses the surface leakage current and improves the current-voltage characteristics. Further improvement of the electrical characteristics is achieved by annealing of the structures in nitrogen, which limits the defect-mediated leakage current and increases the carrier injection efficiency.
关键词： chemical bath deposition,nanoscale heterojunctions,ZnO nanorods,nanoprobe in the scanning electron microscope,current-voltage characteristics,annealing,focused ion beam patterning
更新于2025-09-23 15:19:57
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Single-femtosecond-laser-pulse interaction with mica
摘要： Ultrafast, femtosecond laser pulse interaction with dielectric materials has shown them to have significantly higher laser fluence threshold requirements, as compared to metals and semiconductors, for laser material modification such as laser ablation. The interaction between femtosecond laser pulses and a dielectric, at a wavelength with negligible linear absorption, has usually been found to be weak, and multiple pulse irradiation is therefore typically used to observe quantifiable effects. In this study, the dielectric is the crystalline layered natural mineral muscovite, a mica with formula KAl2(Si3Al) O10(OH)2. A single ~150 fs laser pulse, ~800 nm wavelength, ~6 μm spotsize, is found to lead to a systematic range of laser modification topologies, as a function of fluence of the single laser pulse, including bulk removal. The fs laser pulse/material interaction is greater than expected for a standard dielectric at a given fluence. Optical surface profiling and FESEM are used to characterise the topologies. Contrasting the results of the two techniques supports the use of optical surface profiling to characterise the material modification despite its limitations in lateral resolution as compared to FESEM. The interlayer mineral water content of natural muscovite is proposed as the primary reason that mica behaves differently to a standard dielectric.
关键词： Characterization and analytical techniques,Muscovite mica,Femtosecond mineral processing,Optical surface profiling,Laser surface patterning
更新于2025-09-23 15:19:57
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An investigation of aluminum nitride thin films patterned by femtosecond laser
摘要： In this study, a femtosecond laser etching method is proposed to pattern an aluminum nitride (AlN) ?lm, grown by metal-organic chemical vapor deposition on sapphire. Via control of typical pulse energies, the designed pattern was precisely written in the AlN ?lm. The morphology of the patterned structures was characterized using a three-dimensional laser scanning confocal microscope and a scanning electron microscope; crystalline quality and ?lm strain were analyzed using a Raman spectrometer and a transmission electron microscope. The results indicate that consistent morphologies were achieved with only slight changes to the crystalline quality. The tensile stress of the AlN ?lm was released, and the ?lm surface was slightly compressed after laser patterning. Thus, femtosecond etching has the potential to be an in situ patterning method during ?lm growth.
关键词： film strain,patterning,crystalline quality,femtosecond laser,aluminum nitride,thin films
更新于2025-09-23 15:19:57
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Laser Patterning a Graphene Layer on a Ceramic Substrate for Sensor Applications
摘要： This paper describes a method for patterning the graphene layer and gold electrodes on a ceramic substrate using a Nd:YAG nanosecond fiber laser. The technique enables the processing of both layers and trimming of the sensor parameters. The main aim was to develop a technique for the effective and efficient shaping of both the sensory layer and the metallic electrodes. The laser shaping method is characterized by high speed and very good shape mapping, regardless of the complexity of the processing. Importantly, the technique enables the simultaneous shaping of both the graphene layer and Au electrodes in a direct process that does not require a complex and expensive masking process, and without damaging the ceramic substrate. Our results confirmed the effectiveness of the developed laser technology for shaping a graphene layer and Au electrodes. The ceramic substrate can be used in the construction of various types of sensors operating in a wide temperature range, especially the cryogenic range.
关键词： cryogenic,ceramic substrate,laser patterning,graphene
更新于2025-09-23 15:19:57
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Nanoscaled Fractal Superstructures via Laser Patterninga??A Versatile Route to Metallic Hierarchical Porous Materials
摘要： A laser-based procedure for the preparation of metallic hierarchical porous materials is introduced and exemplified on tin, copper, silicon, titanium, and tungsten surfaces to demonstrate its general applicability. The impact of suitably tuned nanosecond laser pulses triggers a process in which laser-induced metal ablation and instantaneous recondensation of partially oxidized metals lead to cauliflower-like superstructures comprising a hybrid micro-/nanopatterning. Repeated scanning with the intense focused beam over the surface creates microstructures of hierarchically tunable porosity in a layer-by-layer design. The 3D morphology of these superstructures is analyzed using tomographic data based on focused ion-beam scanning electron microscopy to return a fractal dimension of Df = 2.79—practically identical to a natural cauliflower (Df ≈ 2.8), even though the plant is four orders of magnitude larger than the superstructures generated through the laser process. The high Df value signifies a complex morphology that boasts a huge external surface. The introduced concept enables convenient access to a variety of metallic hierarchical porous materials, which are key to performance in environmentally and technologically relevant areas like energy generation, storage, and conversion, as well as sensing and catalysis.
关键词： fractal morphology,cauliflower-like superstructures,porous nanostructures,self-organizing microstructures,scalable patterning
更新于2025-09-23 15:19:57
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Interaction-tailored organization of large-area colloidal assemblies
摘要： Colloidal lithography is an innovative fabrication technique employing spherical, nanoscale crystals as a lithographic mask for the low cost realization of nanoscale patterning. The features of the resulting nanostructures are related to the particle size, deposition conditions and interactions involved. In this work, we studied the absorption of polystyrene spheres onto a substrate and discuss the effect of particle–substrate and particle–particle interactions on their organization. Depending on the nature and the strength of the interactions acting in the colloidal film formation, two different strategies were developed in order to control the number of particles on the surface and the interparticle distance, namely changing the salt concentration and absorption time in the particle solution. These approaches enabled the realization of large area (≈cm2) patterning of nanoscale holes (nanoholes) and nanoscale disks (nanodisks) of different sizes and materials.
关键词： localized surface plasmon resonance,large-area nanostructure patterning,colloidal lithography,spherical nanoparticles,electrostatic interactions
更新于2025-09-19 17:15:36
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New Patterning Technology by Integrating Atomic Layer Deposition Process to the Etching Flow
摘要： We introduce a state-of-the-art patterning process developed by new patterning technology using Atomic Layer Deposition (ALD) towards 5/7 nm generation. In the patterning process, critical dimension (CD) shrink technique without CD loading is one of the key requirements. However, in the conventional CD shrink technique, CD loading can?t be solved in principle. To overcome this issue, by integrating ALD process into the etching flow, we developed a new CD shrink technique without causing CD loading. Furthermore, CD shrink amount can be precisely controlled by the number of ALD cycles while keeping the excellent CD shrink uniformity across a wafer. This is obtained by utilizing a conformal layer with characteristics of ALD?s self-limiting reaction, which is independent of the pattern variety.
关键词： patterning technology,self-limiting reaction,atomic layer deposition,critical dimension loading
更新于2025-09-19 17:15:36