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In-situ monitoring method of PECVD process equipment condition
摘要： A key to successfully have a consistent plasma processing is the maintaining a consistent process chamber condition over a certain production period. To alleviate the concern, in-situ process monitoring sensors are optical emission spectroscopy (OES), optical plasma monitoring sensor (OPMS), VI-probe, and self-plasma optical emission spectroscopy (SP-OES). During the deposition, we perform the monitoring of plasma condition associated with the applied RF power via OES, OPMS and VI-probe. In the chamber cleaning step using remote plasma system does not allow plasma monitoring through sidewall because the plasma is not formed in the process chamber, thus we employed SP-OES to monitor by-product gas chemistry during the chamber cleaning process step. Successful monitoring results with some useful applications, such as arc detection, part failure detection, and cleaning process chemistry analysis, are presented in this paper. The use of in-situ sensors with proper combination can help understanding plasma process better to achieve more precise control of the plasma processing.
关键词： in-situ monitoring,advanced process control,advanced equipment control
更新于2025-09-23 15:23:52
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In situ Photoluminescence Study of Plasma Effects on Passivation of Crystalline Silicon Coated with Aluminum Oxide
摘要： A degradation of crystalline silicon surface passivation provided by aluminum oxide (Al2O3) is generally observed after plasma processes, e.g., deposition of amorphous silicon nitride. To minimize such detrimental effect, a better understanding of the interaction between plasma species and the Al2O3 layer is required. Using in situ photoluminescence, the passivation quality of as-deposited and annealed crystalline silicon wafers coated with Al2O3 grown by atomic layer deposition is characterized in real time during argon-hydrogen plasma exposure. The photoluminescence intensity of as-deposited samples instantly steps up after the plasma ignition, and then it gradually decreases as a function of plasma exposure time. However, only degradation of photoluminescence signal can be found if the samples are annealed prior to the plasma treatment. The interaction between vacuum UV light from plasma and different types of chemical bonds in the Al2O3 layer is proposed to explain the obtained results. Understanding the mechanisms and root cause leading to different behavior between as-deposited and annealed samples under plasma exposure is a first step toward redesigning the process flow for better surface passivation.
关键词： in situ photoluminescence,plasma exposure,aluminum oxide,surface passivation
更新于2025-09-23 15:23:52
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Photo-Optical <i>In-Situ</i> Measurement of Drop Size Distributions: Applications in Research and Industry
摘要： The exact knowledge of Drop Size Distributions (DSD) plays a major role in various fields of applications to control and optimise processes as well as reduce waste. In the microbial production of advanced biofuels, oil droplets are produced under turbulent conditions in an aqueous medium containing many surface active components, which might hinder the recovery of the product. Knowledge of DSD is thus essential for process optimisation. This study demonstrates the capability of a photo-optical measurement method for DSD measurement in fermentation broth and in plate separators aimed at cost reduction in the microbial production of advanced biofuels. Measurements were made with model mixtures in a bioreactor, and at the inlet and outlet of a plate separator. In the bioreactor, the method was effective in detecting a broad range of droplet sizes and in differentiating other disperse components (e.g. microbial cells and gas bubbles). In the plate separator, the method was effective in determining the influence of the varied parameters on the separation efficiency.
关键词： biofuels,in-situ measurement,fermentation broth,Drop Size Distributions,plate separator,photo-optical measurement
更新于2025-09-23 15:23:52
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Harnessing designer biotemplates for biomineralization of TiO2 with tunable photocatalytic activity
摘要： Biomineralization is a promising material synthesis strategy for environmentally benign production of nanostructured metal oxides. An important question is whether biomineralization can be used in the biomimetic synthesis of TiO2 with tunable photocatalytic properties that are conducive to diverse solar energy conversion applications. Here, we report the biomineralization of energy-state-modified TiO2 nanoparticles, where the critical properties closely related to their photocatalytic activity can be manipulated by tailoring the nature of the designer biotemplates. For this purpose, STB1 heptapeptide was employed as a nucleation center to induce TiO2 biomineralization. Three distinctive types of biomolecules (peptide, protein, and phage) were deliberately designed to contain the STB1 nucleation core at different local densities and intermolecular distances. The degree of substitutional nitrogen-doping and the morphology are all subject to the context-dependent differential availability of STB1 in the biomineralization milieu. Phage-induced biomineralization results in TiO2 with modified energy state and wire-like network morphology, which account for significantly enhanced charge dissociation/transport performance and high photocatalytic activity. This is the first study to report that a specific peptide with biomineralizing activity exerts differential impacts on the properties of resulting biomineralization products in a context-dependent manner, and will provide a powerful new strategy for tailoring of material properties via biomineralization.
关键词： Biomineralization,Titanium dioxide,Photocatalyst,in situ substitutional nitrogen-doping,Designer biotemplate
更新于2025-09-23 15:23:52
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A Mechanical and modelling study of magnetron sputtered Cerium-Titanium Oxide film coatings on Si (100)
摘要： Ce/Ti mixed metal oxide thin films have well known optoelectrical properties amongst several other physio-chemical properties. Changes in the structural and mechanical properties of magnetron sputtered Ce/Ti oxide thin films on Si (100) wafers with different Ce:Ti ratios are investigated experimentally and by modelling. X-ray Photoemission Spectroscopy (XPS) and X-ray diffraction (XRD) confirm the primary phases as trigonal Ce2O3 and rutile form of TiO2 with SiO2 present in all prepared materials. FESEM imaging delivers information based on the variation of grain size, the mixed Ce/Ti oxides providing much smaller grain sizes in the thin film/substrate composite. Nanoindentation analysis concludes that the pure cerium oxide film has the highest hardness value (20.1 GPa), while the addition of excess titanium oxide decreases the hardness of the film coatings. High temperature in-situ XRD (up to 1000 °C) results indicate high thermal phase stability for all materials studied. The film with Ce:Ti = 68%:32% has a new additional minor oxide phase above 800 °C. Contact angle experiments suggest that the chemical composition of the surface is insignificant affecting the water contact angle. Results show a narrow band of 87.7o to 95.7o contact angle. The finite element modelling (FEM) modelling of Ce/Ti thin film coatings based on Si(100); Si(110); silica and steel substrates shows a variation in stress concentration.
关键词： in-situ X-ray diffraction,Finite element modelling,Nanoindentation,Cerium titanium oxides,Mechanical properties
更新于2025-09-23 15:23:52
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Communicating the spatiotemporal transformation of architectural heritage via an in-situ projection mapping installation
摘要： Understanding the spatial transformation of architectural heritage over time is crucial for documentation and conservation purposes, but also for communicating the salient architectural features of the buildings’ evolution to the public at large. With the rapid evolution of physical computing technologies such as electronics, sensors and digital projections, we believe that the technique of projection mapping offers great potential in communicating heritage in-situ because its graphical depiction on the heritage itself can more directly relate to the real context in more experiential ways. Furthermore, digital projections can include various interactive functionalities that together with its architectural size provide an immersive experience that is dynamic and adaptable to the interests of the visitors. Consequently, this paper aims to investigate the deployment of an interactive projection mapping installation in-situ which can be steered by a tangible user interface (TUI). Through an in-the-wild study, we deployed a mixed-method evaluation to investigate how such an interactive projection mapping enhances the communication of the spatiotemporal transformation of a medieval chapel that occurred during the last 850 years. Our findings show how the in-situ projection positively affects visitors’ understanding and memorability of the aesthetic features, and how its combination with a tangible interface enhances the communication of the spatial features of the chapel over time, and allows for more social interaction among them. The paper concludes with several discussion points and recommendations for applying interactive projection mapping and TUIs in the context of architectural heritage.
关键词： Spatiotemporal transformation,Tangible user interface (TUI),Heritage communication,Architectural heritage,Projection mapping,In-situ installation
更新于2025-09-23 15:23:52
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Evaluation of the temperature pattern of a complex body from thermal imaging and 3D information: A method and its MATLAB implementation
摘要： The standard setting of a camera used in Infrared thermography (IRT) is based on the choice of the same values of emissivity and distance for all pixels of a thermal image even if the emissivity depends on the relative position of camera and observed surface. Often this is not a problem. However, the resulting temperature pattern could be inadequate if a body having a complex shape is observed from strongly constrained positions. In order to face this issue, a procedure aimed at providing a correct temperature pattern by using 3D information related to a point cloud is proposed together with its MATLAB implementation (COMAP3 toolbox). For each pixel of a thermal image, the relative position of camera and observed surface is estimated, leading to pixel-specific values of emissivity and distance. The temperature obtained in this way is also mapped onto the point cloud. The effectiveness of the procedure in recognizing areas characterized by peculiar thermal behavior is shown in the case of a historic cylindrical masonry bell tower (Caorle’s bell tower, Venice, Italy).
关键词： Damage recognition,3D thermography,In situ measurements,Thermal imaging,Radiometric JPEG image
更新于2025-09-23 15:23:52
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A New Biscarbazole-Based Metal-Organic Framework for Efficient Host-Guest Energy Transfer
摘要： A new metal–organic framework (MOF), [Zn6L4(Me2NH2+)4·3 H2O] (1) was constructed based on [9,9’-biscarbazole]-3,3’,6,6’-tetracarboxylic acid (H4L) and Zn2+ ions. The porous framework and intense blue fluorescence of the MOF based on the biscarbazole moiety of the ligand could facilitate efficient host to guest energy transfer, which makes it an ideal platform for the tuning of luminescence.
关键词： in situ encapsulation,metal–organic frameworks,energy transfer,host–guest systems,fluorescence
更新于2025-09-23 15:23:52
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A novel silicon heterojunction IBC process flow using partial etching of doped a-Si:H to switch from hole contact to electron contact <i>in situ</i> with efficiencies close to 23%
摘要： We present a novel process sequence to simplify the rear‐side patterning of the silicon heterojunction interdigitated back contact (HJ IBC) cells. In this approach, interdigitated strips of a‐Si:H (i/p+) hole contact and a‐Si:H (i/n+) electron contact are achieved by partially etching a blanket a‐Si:H (i/p+) stack through an SiOx hard mask to remove only the p+ a‐Si:H layer and replace it with an n+ a‐Si:H layer, thereby switching from a hole contact to an electron contact in situ, without having to remove the entire passivation. This eliminates the ex situ wet clean after dry etching and also prevents re‐exposure of the crystalline silicon surface during rear‐side processing. Using a well‐controlled process, high‐quality passivation is maintained throughout the rear‐side process sequence leading to high open‐circuit voltages (VOC). A slightly higher contact resistance at the electron contact leads to a slightly higher fill factor (FF) loss due to series resistance for cells from the partial etch route, but the FF loss due to J02‐type recombination is lower, compared with reference cells. As a result, the best cell from the partial etch route has an efficiency of 22.9% and a VOC of 729 mV, nearly identical to the best reference cell, demonstrating that the developed partial etch process can be successfully implemented to achieve cell performance comparable with reference, but with a simpler, cheaper, and faster process sequence.
关键词： interdigitated back contact (IBC),H2 plasma,amorphous silicon,heterojunction,dry etch,process simplification,NF3/Ar plasma,in situ processing
更新于2025-09-23 15:23:52
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Graphene oxide-quenching-based fluorescence in situ hybridization (G-FISH) to detect RNA in tissue: Simple and fast tissue RNA diagnostics
摘要： FISH-based RNA detection in paraffin-embedded tissue can be challenging, with complicated procedures producing uncertain results and poor image quality. Here, we developed a robust RNA detection method based on graphene oxide (GO) quenching and recovery of fluorescence in situ hybridization (G-FISH) in formalin-fixed paraffin-embedded (FFPE) tissues. Using a fluorophore-labeled peptide nucleic acid (PNA) attached to GO, the endogenous long noncoding RNA BC1, the constitutive protein β-actin mRNA, and miR-124a and miR-21 could be detected in the cytoplasm of a normal mouse brain, primary cultured hippocampal neurons, an Alzheimer’s disease model mouse brain, and glioblastoma multiforme tumor tissues, respectively. Coding and non-coding RNAs, either long or short, could be detected in deparaffinized FFPE or frozen tissues, as well as in clear lipid-exchanged anatomically rigid imaging/immunostaining-compatible tissue hydrogel (CLARITY)-transparent brain tissues. The fluorescence recovered by G-FISH correlated highly with the amount of miR-21, as measured by quantitative real time RT-PCR. We propose G-FISH as a simple, fast, inexpensive, and sensitive method for RNA detection, with a very low background, which could be applied to a variety of research or diagnostic purposes.
关键词： glioblastoma multiforme tumor,tissue RNA diagnostics,Graphene oxide-quenching-based fluorescence in situ hybridization (G-FISH),Alzheimer’s disease,formalin-fixed paraffin-embedded (FFPE) tissue
更新于2025-09-23 15:23:52